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公开(公告)号:JP2001298037A
公开(公告)日:2001-10-26
申请号:JP2001073057
申请日:2001-03-14
Applicant: IBM
Inventor: WAYNE J HOWELL , RONALD L MENDELSON , WILLIAM T MOTOSUIFU
IPC: H01L23/52 , H01L21/3205 , H01L21/60 , H01L23/485
Abstract: PROBLEM TO BE SOLVED: To provide a structure and method that forms mechanically and electrically firm interconnection between the copper wiring of an integrated circuit and a solder ball without diffusing tin or lead from the solder ball to final copper wiring. SOLUTION: This structure (and method) for metallurgy structure is equipped with a passivation layer, a via that passes through the passivation layer to extend to a metal line in the metallurgy structure, a barrier layer that allows the via to be subjected to lining, a metal plug that is the metal plug in the via on the barrier layer while the metal plug and the metal wire contain the same material, and a solder bump that is formed on the metal plug.
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公开(公告)号:JP2000260804A
公开(公告)日:2000-09-22
申请号:JP2000049474
申请日:2000-02-25
Applicant: IBM
Inventor: FERENCE THOMAS G , WAYNE J HOWELL
Abstract: PROBLEM TO BE SOLVED: To surely form very small interconnections between two boards. SOLUTION: This semiconductor structure has a first board 106 and a second board 108 bonded to the first board 106. A plurality of contacts 110, 112 are extended between the first and second boards 106, 108. A plurality of first solder bumps 114, 116 are connected between the first and second boards 106, 108 for positioning the contacts 110 to the contact pads 112.
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