公开(公告)号：CA930976A

公开(公告)日：1973-07-31

申请号：CA62556

申请日：1969-09-22

Applicant: IBM

Inventor： WHITE W JR ,  BOERGER F

IPC: G01K7/02 ,  F27D11/06 ,  G01K1/08 ,  G01K1/14 ,  G01K7/00 ,  H05B6/02

Abstract: 1,261,994. Induction heating apparatus. INTERNATIONAL BUSINESS MACHINES CORP. 5 Sept., 1969 [26 Sept., 1968], No. 43963/69. Heading H5H. A device 20 for sensing the temperature of a susceptor 14 within a chamber 10 using an RF heating coil 18, comprises an auxiliary susceptor 19 outside the chamber 10, and arranged to receive electromagnetic energy indicative of the power level of the field of the coil 18, and means for sensing the temperature of the susceptor 19, viz. a thermocouple 26, Fig. 2 (not shown), in a tube 23 of device 20. The susceptor 14 carries semi-conductor substrates 15 on which an epitaxial film is deposited at a temperature kept constant by means using the device 20 of the invention. Susceptors 14, 19, are of carbon or graphite. A non-reactive gas, such as nitrogen, is supplied to device 20, or the device is vacuum sealed. The substrates 15 can be continuously moved through the chamber 10. Susceptor 19 may be disposed within the field of an RF coil, having proportional characteristics to coil 18, at a remote location.