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公开(公告)号：BE771417A
公开(公告)日：1971-12-31
申请号：BE771417
申请日：1971-08-17
Applicant: IBM
Inventor： GRANDIA J , WOODALL R M POTEMSKIET J M
IPC: C30B19/06 , H01L21/208 , B01J
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