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公开(公告)号：DE69333248T2
公开(公告)日：2004-04-29
申请号：DE69333248
申请日：1993-04-08
Applicant: AIR PROD & CHEM , IBM
Inventor： MCDERMOTT WAYNE THOMAS , WU JIN JWANG , OCKOVIC RICHARD CARL
Abstract: The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
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公开(公告)号：IE70238B1
公开(公告)日：1996-11-13
申请号：IE189191
申请日：1991-06-04
Applicant: AIR PROD & CHEM , IBM
Inventor： MCDERMOTT WAYNE THOMAS , OCKOVIC RICHARD CARL , COOPER DOUGLAS WINSLOW , SCHWARZ ALEXANDER , WOFE HENRY LEWIS , WU JIN JWANG
IPC: H01L21/304 , B08B3/12 , B08B7/00 , B24C1/00 , B24C3/32 , H01L21/00 , H01L21/302 , H01L21/461 , B08B5/02
Abstract: A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
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公开(公告)号：DE69423931T2
公开(公告)日：2000-10-12
申请号：DE69423931
申请日：1994-05-06
Applicant: IBM
Inventor： CAVALIERE WILLIAM ALBERT , KUDER ROBERT PAUL , WU JIN JWANG
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公开(公告)号：DE69112913D1
公开(公告)日：1995-10-19
申请号：DE69112913
申请日：1991-05-29
Applicant: AIR PROD & CHEM , IBM
Inventor： MCDERMOTT WAYNE THOMAS , OCKOVIC RICHARD CARL , WU JIN JWANG , COOPER DOUGLAS WINSLOW , SCHWARZ ALEXANDER , WOLFE HENRY LEWIS
IPC: H01L21/304 , B08B3/12 , B08B7/00 , B24C1/00 , B24C3/32 , H01L21/00 , H01L21/302 , H01L21/461 , B08B5/02
Abstract: A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
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公开(公告)号：ES2208635T3
公开(公告)日：2004-06-16
申请号：ES93105827
申请日：1993-04-08
Applicant: AIR PROD & CHEM , IBM
Inventor： MCDERMOTT WAYNE THOMAS , WU JIN JWANG , OCKOVIC RICHARD CARL
Abstract: The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
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Patent Agency Ranking
公开(公告)号：DE69333248D1
公开(公告)日：2003-11-20
申请号：DE69333248
申请日：1993-04-08
Applicant: AIR PROD & CHEM , IBM
Inventor： MCDERMOTT WAYNE THOMAS , WU JIN JWANG , OCKOVIC RICHARD CARL
Abstract: The present invention is an apparatus for cleaning semi-conductor solid surfaces using a spray of frozen cryogen, such as argon, to impinge on the solid surface to remove contaminant particles. The apparatus includes an appropriate nozzle positioned in a housing designed for ultra clean conditions including sweep gas supply and evacuation conduits and a support table movably positioned within the housing to controllably convey the semi-conductor solid surface on a track under the spray of frozen cryogen emanating from the nozzle.
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公开(公告)号：DE69423931D1
公开(公告)日：2000-05-18
申请号：DE69423931
申请日：1994-05-06
Applicant: IBM
Inventor： CAVALIERE WILLIAM ALBERT , KUDER ROBERT PAUL , WU JIN JWANG
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公开(公告)号：DE69417109D1
公开(公告)日：1999-04-22
申请号：DE69417109
申请日：1994-05-06
Applicant: IBM
Inventor： BAUER TIBOR LOUIS , CAVALIERE WILLIAM ALBERT , DART II , FREEBERN TIMOTHY H , LINNELL DAVID CLYDE , MILLER JAMES M , WU JIN JWANG
Abstract: A heat exchanger (10) includes a housing (30), a reservoir (25) comprising a solid material mounted within the housing (30), temperature control means (31-34,77,80) for controlling the temperature of the reservoir (25), and energy exchange means (45) for allowing thermal contact between the reservoir (25) and a substance for effectuating transfer of energy from the reservoir (25) to the substance for regulating the temperature of the substance.
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公开(公告)号：CA2043445C
公开(公告)日：1997-01-21
申请号：CA2043445
申请日：1991-05-29
Applicant: AIR PROD & CHEM , IBM
Inventor： MCDERMOTT WAYNE THOMAS , OCKOVIC RICHARD CARL , WU JIN JWANG , COOPER DOUGLAS WINSLOW , SCHWARZ ALEXANDER , WOLFE HENRY LEWIS
Abstract: A method is disclosed for cleaning microelectronic surfaces using an aerosol of at least substantially solid argon particles which impinge upon the surface to be cleaned and then evaporate and the resulting gas is removed by venting along with the contaminants dislodged by the cleaning method.
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公开(公告)号：DE69417109T2
公开(公告)日：1999-10-14
申请号：DE69417109
申请日：1994-05-06
Applicant: IBM
Inventor： BAUER TIBOR LOUIS , CAVALIERE WILLIAM ALBERT , DART II , FREEBERN TIMOTHY H , LINNELL DAVID CLYDE , MILLER JAMES M , WU JIN JWANG
Abstract: A heat exchanger (10) includes a housing (30), a reservoir (25) comprising a solid material mounted within the housing (30), temperature control means (31-34,77,80) for controlling the temperature of the reservoir (25), and energy exchange means (45) for allowing thermal contact between the reservoir (25) and a substance for effectuating transfer of energy from the reservoir (25) to the substance for regulating the temperature of the substance.
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