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公开(公告)号:GB2487307A
公开(公告)日:2012-07-18
申请号:GB201200820
申请日:2010-11-03
Applicant: IBM
Inventor: OUYANG QIQING CHRISTINE , DENNARD ROBERT HEATH , YAU JENGBANG
IPC: H01L27/12 , H01L21/336 , H01L21/762 , H01L21/84 , H01L29/66 , H01L29/786
Abstract: A semiconductor wafer structure for integrated circuit devices includes a bulk substrate; a lower insulating layer formed on the bulk substrate; an electrically conductive back gate layer formed on the lower insulating layer; an upper insulating layer formed on the back gate layer; and a hybrid semiconductor-on-insulator layer formed on the upper insulating layer, the hybrid semiconductor-on-insulator layer comprising a first portion having a first crystal orientation and a second portion having a second crystal orientation.