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公开(公告)号：FR2335045A1
公开(公告)日：1977-07-08
申请号：FR7632456
申请日：1976-10-18
Applicant: IBM
Inventor： POPONIAK MICHAEL R , YE TSU-HSING
IPC: H01L27/08 , H01L21/265 , H01L21/322 , H01L21/48 , H01L21/76 , H01L29/32 , H01L29/78 , H01L21/70 , H01L27/04
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