Patent search ap:("IBM") AND inv:"ZINGERMAN BRYANT" Page 1

1.

发明专利
PROCESS FOR THE REMOVAL OF A METALLIC LAYER FROM A SEMICONDUCTOR BODY BY REACTIVE ION ETCHING 未知

公开(公告)号：DE2860855D1

公开(公告)日：1981-10-22

申请号：DE2860855

申请日：1978-12-20

Applicant: IBM

Inventor： KITCHER JAMES ROBERT , OZOLS GUNARS MIERVALDIS , ZINGERMAN BRYANT

IPC: H01L21/302 , C23F4/00 , H01L21/28 , H01L21/3065 , H01L21/3213 , H01L21/768 , C23C15/00 , H01L21/306 , H01L21/60

Patent Agency Ranking