公开(公告)号：EP1341643A4

公开(公告)日：2004-06-09

申请号：EP01274075

申请日：2001-11-20

Applicant: IBM ,  FREUDENBERG NONWOVENS L P

Inventor： CHEN SHYNG-TSONG ,  RODBELL KENNETH P ,  HSU OSCAR KAI CHI ,  VANGSNESS JEAN ,  GILBRIDE DAVID S ,  BILLINGS SCOTT CLAYTON ,  DAVIS KENNETH

IPC: B24B37/24 ,  B24D3/28 ,  B24D11/00 ,  B24D13/14 ,  C08J5/14 ,  H01L21/304 ,  B24B37/04

CPC classification number: B24B37/24 ,  B24D3/28 ,  B24D11/008

Abstract: A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.

公开(公告)号：AU2001297847A1

公开(公告)日：2002-12-23

申请号：AU2001297847

申请日：2001-11-20

Applicant: IBM ,  FREUDENBERG NONWOVENS L P

Inventor： RODBELL KENNETH P ,  VANGSNESS JEAN ,  HSU OSCAR KAI CHI ,  BILLINGS SCOTT CLAYTON ,  DAVIS KENNETH ,  GILBRIDE DAVID S ,  CHEN SHYNG-TSONG

IPC: B24B37/24 ,  B24D3/28 ,  B24D11/00 ,  B24D13/14 ,  C08J5/14 ,  H01L21/304 ,  B24B1/00 ,  B27N3/18

公开(公告)号：WO02100593A3

公开(公告)日：2003-06-05

申请号：PCT/US0143208

申请日：2001-11-20

Applicant: IBM ,  CHEN SHYNG-TSONG ,  RODBELL KENNETH P ,  HSU OSCAR KAI CHI ,  VANGSNESS JEAN ,  GILBRIDE DAVID S ,  BILLINGS SCOTT CLAYTON ,  DAVIS KENNETH

Inventor： CHEN SHYNG-TSONG ,  RODBELL KENNETH P ,  HSU OSCAR KAI CHI ,  VANGSNESS JEAN ,  GILBRIDE DAVID S ,  BILLINGS SCOTT CLAYTON ,  DAVIS KENNETH

IPC: B24B37/24 ,  B24D3/28 ,  B24D11/00 ,  B24D13/14 ,  C08J5/14 ,  H01L21/304 ,  B24B1/00 ,  B27N3/18

CPC classification number: B24B37/24 ,  B24D3/28 ,  B24D11/008

Abstract: A polishing pad having a body comprising fibers embedded in a matrix polymer formed by a reaction of polymer precursors. The fibers define interstices, and the precursors fill these interstices substantially completely before completion of the reaction. The pad may include a thin layer of free fibers at its polishing surface. A segment of at least a portion of the free fibers are embedded in the adjacent body of the polymer and fibers. The fibers may be separate, or in the form of a woven or non-woven web.

Abstract translation: 一种抛光垫，其具有包含嵌入在通过聚合物前体的反应形成的基质聚合物中的纤维的主体。 纤维定义空隙，并且前体在反应完成之前基本上完全填充这些间隙。 衬垫在其抛光表面可以包括薄层的自由纤维。 至少一部分自由纤维的片段嵌入在聚合物和纤维的相邻体中。 纤维可以是分开的，或者是织造或非织造网的形式。