公开(公告)号：DE3119823A1

公开(公告)日：1982-12-16

申请号：DE3119823

申请日：1981-05-19

Applicant: IBM DEUTSCHLAND

Inventor： HAEUSLER GERD DIPL PHYS DR ,  JAERISCH WALTER DIPL PHYS DR

IPC: G02B26/06 ,  G02B27/00

Abstract: In order to correct geometrical distortions in an optical imaging system, a deformable mirror (2) is inserted between the object plane (O) and the aperture stop (EP), whose surface inclination can be varied locally by a multiplicity of actuators (23) that can be operated independently of one another. The distortion correction is intended, in particular, for optoelectronic imaging systems, in order to correct distortions which are produced in the optoelectronic interfaces (image-converter tubes, monitors).

公开(公告)号：DE3019930A1

公开(公告)日：1981-12-03

申请号：DE3019930

申请日：1980-05-24

Applicant: IBM DEUTSCHLAND

Inventor： HAEUSLER GERD DIPL PHYS DR ,  JAERISCH WALTER DIPL PHYS DR

IPC: G01M11/00 ,  G01M11/02 ,  G02B27/60

公开(公告)号：DE3020022A1

公开(公告)日：1981-12-03

申请号：DE3020022

申请日：1980-05-24

Applicant: IBM DEUTSCHLAND

Inventor： HAEUSLER GERD DIPL PHYS DR ,  JAERISCH WALTER DIPL PHYS DR ,  MAKOSCH GUENTER DIPL PHYS

IPC: G01B9/02 ,  G01M11/00 ,  G01M11/02 ,  G01B11/14 ,  H01L21/66 ,  H01L21/70

Abstract: Optical imaging systems are used for making microstructures, and have to be very precise. In order to test these imaging systems, a new method, and a device for carrying out this method, are described in which two interferograms are made and compared. In a first step, an interferogram of an original pattern is made, followed by a second step in which an interferogram of a copy of the original pattern is produced using the identical conditions used to form the first interferogram. The pattern copy is made in the imaging system to be tested. In a third step, the two interferograms are compared with one another to provide a measure of the accuracy of the imaging system. This technique can be used for testing imaging systems which produce only a mirror image.