公开(公告)号：DE2264030A1

公开(公告)日：1974-07-18

申请号：DE2264030

申请日：1972-12-29

Applicant: IBM DEUTSCHLAND

Inventor： KORTH HANS ERDMANN DIPL PHYS ,  FROSCH ALBERT DIPL PHYS ,  SOLF BERNHARD DIPL ING ,  KALLMEYER MICHAEL

IPC: G01B11/30 ,  G01B11/24

公开(公告)号：DE3175044D1

公开(公告)日：1986-09-04

申请号：DE3175044

申请日：1981-10-30

Applicant: IBM DEUTSCHLAND ,  IBM

Inventor： ASCH KARL ,  GRESCHNER JOHANN DR ,  KALLMEYER MICHAEL ,  KULCKE WERNER DR

IPC: G01R1/06 ,  G01R1/073

Abstract: A probe head arrangement for contacting a plurality of closely adjacent conductor lines 2 comprises a minimum of one probe head 3, where a plurality of fingers 4 together with a back 5 are made in one piece of monocrystalline silicon in semiconductor technique. A plurality of such probe heads 3 are composed to form a tester. At the beginning of each test it is determined which fingers 4 are to be, and are not to be placed onto the individual conductor lines 2 of a card 1 to be tested. Subsequently, the short and interruption tests can be implemented after the correlation of finger and probe head addresses with the conductor line addresses.