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公开(公告)号：DE2338388A1
公开(公告)日：1975-02-13
申请号：DE2338388
申请日：1973-07-28
Applicant: IBM DEUTSCHLAND
Inventor： G DIPL-PHYS DR FOLBERTH OTTO , G DIPL-ING DR BAITINGER UTZ , HAUG WERNER DIPL-ING , KROELL KARL-EUGEN DIPL-PHYS DR
IPC: H01L21/8234 , H01L21/331 , H01L27/06 , H01L27/088 , H01L29/00 , H01L29/10 , H01L29/423 , H01L29/73 , H01L29/78 , H01L29/76
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