公开(公告)号：DE2603688A1

公开(公告)日：1977-08-11

申请号：DE2603688

申请日：1976-01-31

Applicant: IBM DEUTSCHLAND

Inventor： FROSCH ALBERT DIPL PHYS ,  MANNSDOERFER WALTER ,  SCHEUING CLAUS ING GRAD

IPC: F16F15/02 ,  F16F6/00 ,  F16F7/104 ,  F16F15/18

Abstract: This invention is directed to an arrangement for compensating and absorbing vibratory oscillations of a driven spring-mass system by means of an auxiliary spring mass system. The drive for a main spring-mass system is designed such that it is guided along the same axis as the main system and oscillates out of phase with the main system.

公开(公告)号：DE2658399A1

公开(公告)日：1978-06-29

申请号：DE2658399

申请日：1976-12-23

Applicant: IBM DEUTSCHLAND

Inventor： FROSCH ALBERT DIPL PHYS ,  HOLZINGER GERHARD DIPL PHYS DR ,  JAERISCH WALTER DIPL PHYS DR ,  SCHEUING CLAUS ING GRAD

IPC: G01B11/30 ,  G01J

Abstract: This invention relates to an interferometric process, and particularly to a process for examining the planarity of surfaces.

公开(公告)号：DE2915313A1

公开(公告)日：1980-10-23

申请号：DE2915313

申请日：1979-04-14

Applicant: IBM DEUTSCHLAND

Inventor： KALLMEYER MICHAEL ING GRAD ,  ROESCH HANS DIPL ING DR ,  SCHEUING CLAUS ING GRAD ,  SOLF BERNHARD DIPL ING

IPC: B41J2/44 ,  B23Q1/34 ,  B25J7/00 ,  B41J2/295 ,  G03B41/00 ,  G03F9/02 ,  H01L41/04 ,  H01L41/08 ,  H01L41/083 ,  H01L41/09 ,  H02N2/00 ,  H02N2/04 ,  G03B3/00 ,  G05D3/00 ,  G11B7/08 ,  H02N11/00