公开(公告)号：US09466628B2

公开(公告)日：2016-10-11

申请号：US14135872

申请日：2013-12-20

Applicant: IMEC

Inventor： Pilar Gonzalez ,  Murali Jayapala ,  Andy Lambrechts ,  Klaas Tack

IPC: H01L27/146 ,  G01J3/02 ,  G01J3/26 ,  G01J3/28 ,  G01J3/36 ,  G01B7/06

CPC classification number: H01L27/14625 ,  G01B7/08 ,  G01J3/0297 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/36

Abstract: A solid-state spectral imaging device is described. The device includes an image sensor and a plurality of optical filters directly processed on top of the image sensor. Each optical filter includes a first mirror and a second mirror defining an optical filter cavity having a fixed height. Each optical filter also includes a first electrode and a second electrode having a fixed position located opposite to each other and positioned to measure the height of the optical filter cavity. Further, a method to calibrate spectral data of light and a computer program for calibrating light is described.

Abstract translation: 描述了固态光谱成像装置。 该装置包括在图像传感器的顶部直接处理的图像传感器和多个光学滤波器。 每个滤光器包括第一反射镜和限定具有固定高度的光学滤光腔的第二反射镜。 每个滤光器还包括第一电极和第二电极，所述第一电极和第二电极具有彼此相对定位并固定以测量光学滤光器空腔的高度的固定位置。 此外，描述了校准光的光谱数据的方法和用于校准光的计算机程序。

公开(公告)号：US20140175265A1

公开(公告)日：2014-06-26

申请号：US14135872

申请日：2013-12-20

Applicant: IMEC

Inventor： Pilar Gonzalez ,  Murali Jayapala ,  Andy Lambrechts ,  Klaas Tack

IPC: H01L27/146

CPC classification number: H01L27/14625 ,  G01B7/08 ,  G01J3/0297 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/36

Abstract: A solid-state spectral imaging device is described. The device includes an image sensor and a plurality of optical filters directly processed on top of the image sensor. Each optical filter includes a first mirror and a second mirror defining an optical filter cavity having a fixed height. Each optical filter also includes a first electrode and a second electrode having a fixed position located opposite to each other and positioned to measure the height of the optical filter cavity. Further, a method to calibrate spectral data of light and a computer program for calibrating light is described.

Abstract translation: 描述了固态光谱成像装置。 该装置包括在图像传感器的顶部直接处理的图像传感器和多个光学滤波器。 每个滤光器包括第一反射镜和限定具有固定高度的光学滤光腔的第二反射镜。 每个滤光器还包括第一电极和第二电极，所述第一电极和第二电极具有彼此相对定位并固定以测量光学滤光器空腔的高度的固定位置。 此外，描述了校准光的光谱数据的方法和用于校准光的计算机程序。