公开(公告)号：WO2015177373A1

公开(公告)日：2015-11-26

申请号：PCT/EP2015/061479

申请日：2015-05-22

Applicant: IMEC VZW

Inventor： VAN DORPE, Pol ,  LAGAE, Liesbet ,  PEUMANS, Peter ,  STASSEN, Andim ,  HELIN, Philippe ,  DU BOIS, Bert ,  SEVERI, Simone

IPC: G01N21/64

CPC classification number: G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N21/7703 ,  G01N2201/0873

Abstract: The invention provides an integrated semiconductor device (100) for detecting fluorescent tags, comprising a first layer (101) comprising a detector element (107), a second layer (102) located on top of the first layer (101) and comprising a rejection filter, a third layer (103) located on top of the second layer (102) and being fabricated from a dielectric material, a fourth layer (104) located on top of the third layer (103) and comprising an optical waveguide, and furthermore a fifth layer located on top of the fourth layer comprising a microfluidic channel (106). The optical waveguide is configured and positioned such that the micro-fluidic channel (106) is illuminated with an evanescent tail of excitation light guided by the optical waveguide. The rejection filter is positioned such that fluorescence from activated fluorescent tags present on top of the fourth layer (104) is filtered before falling onto the detector element (107). The rejection filter is configured to reject the wavelength range of the excitation light and configured to transmit the wavelength range of fluorescence from the activated fluorescent tags towards the detector element (107).

Abstract translation: 本发明提供了一种用于检测荧光标签的集成半导体器件（100），包括：第一层（101），包括检测器元件（107），位于第一层（101）顶部的第二层（102） 过滤器，位于第二层（102）的顶部并由电介质材料制成的第三层（103），位于第三层（103）的顶部上并包括光波导的第四层（104），此外 位于第四层顶部的第五层包括微流体通道（106）。 光波导被配置和定位成使得微流体通道（106）被由光波导引导的激发光的渐逝尾部照亮。 排斥滤光器被定位成使得存在于第四层（104）的顶部上的来自活化荧光标签的荧光在落到检测器元件（107）之前被过滤。 拒绝滤波器被配置为拒绝激发光的波长范围并且被配置为将荧光的波长范围从激活的荧光标签朝向检测器元件（107）传输。

公开(公告)号：EP3146312B1

公开(公告)日：2018-07-04

申请号：EP15724643.0

申请日：2015-05-22

Applicant: IMEC vzw

Inventor： VAN DORPE, Pol ,  LAGAE, Liesbet ,  PEUMANS, Peter ,  STASSEN, Andim ,  HELIN, Philippe ,  DU BOIS, Bert ,  SEVERI, Simone

IPC: G01N21/64 ,  G01N21/77

CPC classification number: G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N21/7703 ,  G01N2201/0873

Abstract: The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.

公开(公告)号：EP3146312A1

公开(公告)日：2017-03-29

申请号：EP15724643.0

申请日：2015-05-22

Applicant: IMEC vzw

Inventor： VAN DORPE, Pol ,  LAGAE, Liesbet ,  PEUMANS, Peter ,  STASSEN, Andim ,  HELIN, Philippe ,  DU BOIS, Bert ,  SEVERI, Simone

IPC: G01N21/64

CPC classification number: G01N21/6428 ,  G01N21/6454 ,  G01N21/648 ,  G01N21/7703 ,  G01N2201/0873

Abstract: The present disclosure relates to semiconductor devices for detecting fluorescent particles. At least one embodiment relates to an integrated semiconductor device for detecting fluorescent tags. The device includes a first layer, a second layer, a third layer, a fourth layer, and a fifth layer. The first layer includes a detector element. The second layer includes a rejection filter. The third layer is fabricated from dielectric material. The fourth layer is an optical waveguide configured and positioned such that a top surface of the fourth layer is illuminated with an evanescent tail of excitation light guided by the optical waveguide when the fluorescent tags are present. The fifth layer includes a microfluidic channel. The optical waveguide is configured and positioned such that the microfluidic channel is illuminated with the evanescent tail. The detector element is positioned such that light from activated fluorescent tags can be received.

Abstract translation: 本公开涉及用于检测荧光颗粒的半导体器件。 至少一个实施例涉及用于检测荧光标签的集成半导体器件。 该装置包括第一层，第二层，第三层，第四层和第五层。 第一层包括检测器元件。 第二层包括拒绝滤波器。 第三层由介电材料制成。 第四层是配置和定位的光波导，当存在荧光标签时，第四层的顶表面被由光波导引导的激发光的渐逝尾部照亮。 第五层包括微流体通道。 光波导被配置和定位成使得微流体通道被渐逝尾部照亮。 检测器元件被定位成使得能够接收来自激活的荧光标签的光。