公开(公告)号：GB2463209A

公开(公告)日：2010-03-10

申请号：GB201000317

申请日：2008-07-11

Applicant: INFICON INC

Inventor： YANG CHENGLONG ,  MERRILL JEFFREY P ,  FREES LOUIS C ,  LAKEMAN STEVEN J ,  HOFFMAN DANIEL E

IPC: H01J49/14 ,  H01J37/32 ,  H05H1/24

Abstract: An ion source apparatus for partial pressure analyzers and in-situ cleaning method thereof based on inducing a hollow cathode discharge (HCD) inside the ion source. The HCD is formed by applying a high negative voltage to one or more parts of the ion source, including the anode electrode, the lens focus plate and at least one other lens or other form of plate, such as a total pressure collector plate.