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    ION COLLECTING ELECTRODE FOR TOTAL-PRESSURE COLLECTOR
    1.
    发明专利
    ION COLLECTING ELECTRODE FOR TOTAL-PRESSURE COLLECTOR 失效

    公开(公告)号：JPH1140099A

    公开(公告)日：1999-02-12

    申请号：JP7468598

    申请日：1998-03-23

    Applicant: LEYBOLD INFICON INC

    Inventor： HOLKEBOER DAVID H ,  FREES LOUIS C

    IPC: G01N27/62 ,  H01J49/04 ,  H01J49/06

    Abstract: PROBLEM TO BE SOLVED: To provide a total-pressure collector that blocks the adverse effects of secondary electron currents liable to deteriorate the total performance of a mass spectrometer for detecting various types of ion, by directing secondary electrons away from an ion measuring device as used for a dual ion or other ion source. SOLUTION: A mass-spectrometer gas analysis device 1 includes an ion source 16 for producing ions of sample gas in a specified capacity. The first part of the ions produced is recovered and analyzed by an ion analyzer 18, which then determines a partial pressure on selected types of gas in the sample gas. The second part of the ions is recovered by an ion collector 22 on the other side, which then determines a total pressure on the sample gas. The collecting surface of the collector 22 is oriented in relation to incident ion beams for the recovery of ionic currents, and is designed to deflect the substantial part of plural secondary electrons generated by ion collisions as a result of the usage of the collector 22 way below the ionization capacity. The partial pressure is thus determined by the analyzer 18 receiving no secondary electrons.

    Detection of nontransient processing anomalies in vacuum manufacturing process
    2.
    发明专利
    Detection of nontransient processing anomalies in vacuum manufacturing process 未知

    公开(公告)号：AU5224899A

    公开(公告)日：2000-02-14

    申请号：AU5224899

    申请日：1999-07-22

    Applicant: LEYBOLD INFICON INC

    Inventor： FREES LOUIS C ,  RIO VALENTIN

    IPC: H01L21/00 ,  H01L21/66 ,  G01R31/26

    Abstract: A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of specific materials are detected. Furthermore, the timer is set to run a predetermined time interval after activation so as to discriminate between known transient processing conditions and the presence of impurities which can greatly influence the manufacturing process. When the timer exceeds the predetermined time duration, an output signal can alert the process operator or automatically shutdown the manufacturing tool.

    4.
    发明专利
    未知

    公开(公告)号：DE112005001120T5

    公开(公告)日：2007-04-26

    申请号：DE112005001120

    申请日：2005-05-18

    Applicant: INFICON INC

    Inventor： ELLEFSON ROBERT E ,  FREES LOUIS C

    IPC: H01J49/14 ,  H01J27/20 ,  H01J49/10

    Abstract: A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.

    Mass spectrometer total pressure collector
    5.
    发明专利
    Mass spectrometer total pressure collector 未知

    公开(公告)号：GB2323468A

    公开(公告)日：1998-09-23

    申请号：GB9806007

    申请日：1998-03-23

    Applicant: LEYBOLD INFICON INC

    Inventor： HOLKEBOER DAVID H ,  FREES LOUIS C

    IPC: G01N27/62 ,  H01J49/04 ,  H01J49/06 ,  H01J49/02 ,  H01J49/14

    Abstract: A mass spectrometer gas analyzer includes an ion source 16 for producing ions of a sample gas in a defined ionisation volume 26. An ion analyzer 18 collects and analyzes a first portion of the produced ions to determine a partial pressure for a selected gas species within the sample gas. An oppositely disposed ion collector 22A collects a second portion of the ions to determine a total pressure of the contained gas sample. A collecting surface 21A of the ion collector 22A is positioned relative to the incoming ion beam to allow collection of ion current but the surface is configured such that a substantial portion of a plurality of secondary electrons produced by ion bombardment with the ion collector 22A are deflected away from the ionization volume 26. The partial pressure is thus determined by the ion analyzer 18 without secondary electrons entering the ion analyzer 18.

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