公开(公告)号：DE50007463D1

公开(公告)日：2004-09-23

申请号：DE50007463

申请日：2000-12-08

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BEITEL DR ,  SAENGER DR ,  HARTNER WALTER

IPC: C23C14/02 ,  C23C14/16 ,  C23C14/58 ,  C23C16/40 ,  H01L21/02 ,  H01L21/321

Abstract: Production of a structured layer comprises preparing a pre-structured substrate; applying a precious metal and a donor material containing an additive which is not a precious metal in two or more layers onto the substrate; heat treating the layers at 400-800 degrees C so that the additive diffuses into the precious metal; and chemical-mechanical polishing the alloying layer.