公开(公告)号：DE10151320A1

公开(公告)日：2003-05-15

申请号：DE10151320

申请日：2001-10-17

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BLEICHER MARKUS ,  KOELL WOLFGANG ,  UNTERWEGER JOSEF

IPC: H01L21/306 ,  H01L21/68

Abstract: Carrier (31) of disks (2), in particular, in the form of semiconductor wafers in wet chemical processes comprises at least two matching seating units (31a, 31b) with slits (11) for the disks. At least one (31b) of the seating units is provided with means (243, 253, 263) for prevention of rotation of the disks in the carrier.

公开(公告)号：DE10151320B4

公开(公告)日：2006-02-09

申请号：DE10151320

申请日：2001-10-17

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BLEICHER MARKUS ,  KOELL WOLFGANG ,  UNTERWEGER JOSEF

IPC: H01L21/306 ,  H01L21/68