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公开(公告)号：WO0026608A3
公开(公告)日：2000-07-27
申请号：PCT/DE9903543
申请日：1999-11-04
Applicant: INFINEON TECHNOLOGIES AG , AIGNER ROBERT , HIEROLD CHRISTOFER , OPPERMANN KLAUS GUENTER , GLEHR MANFRED
Inventor： AIGNER ROBERT , HIEROLD CHRISTOFER , OPPERMANN KLAUS-GUENTER , GLEHR MANFRED
CPC classification number: G01B7/22
Abstract: The invention relates to a micromechanical sensor comprising electrodes (1, 2) which are arranged on a substrate, and comprising electrode bars (A) made of silicon that can move with regard to the electrodes. A deformation of the substrate is measured by determining the differential changes in capacity of these electrode bars in comparison to the adjacently arranged electrodes. Two groups of electrode bars are preferably used which are interlocked with one another in an alternating comb-like manner, which, separate from one another, are interconnected at the ends thereof in an electrically conductive manner, and which are anchored on the substrate.
Abstract translation: 微型机械传感器，其具有布置在基板上的电极（1,2）以及由硅制成的电极棒（A），所述电极棒可相对于电极移动。 通过确定这些电极棒相对于与其相邻布置的电极的差分电容变化来检测衬底的变形。 优选地，使用两组梳状互相啮合的电极棒，它们彼此分开并且在其端部导电连接并且锚定在衬底上。
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公开(公告)号：DE59913964D1
公开(公告)日：2006-12-14
申请号：DE59913964
申请日：1999-11-04
Applicant: INFINEON TECHNOLOGIES AG
Inventor： AIGNER ROBERT , HIEROLD CHRISTOFER , OPPERMANN KLAUS-GUENTER , GLEHR MANFRED
Abstract: A micromechanical sensor is described which contains electrodes that are disposed on a substrate, and electrode bars made of silicon that can move with regard to the electrodes. A deformation of the substrate is measured by determining differential changes in a capacity of the electrode bars in comparison to adjacently disposed electrodes. Two groups of electrode bars are preferably used which are interlocked with one another in an alternating comb-like manner, which, are separate from one another, and are interconnected at the ends thereof in an electrically conductive manner, and which are anchored on the substrate.
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