公开(公告)号：DE102004019346A1

公开(公告)日：2005-11-10

申请号：DE102004019346

申请日：2004-04-21

Applicant: INFINEON TECHNOLOGIES AG

Inventor： BRATT GARY ,  VERHOEVEN MARTIN ,  LESCHOK ANDRE

IPC: G03B9/02 ,  G03F7/20

Abstract: Screen (1) comprises a substrate (40) having a surface (44) containing a reflecting element (41) for the reflection of an incident light beam (100) and a control unit (48) for adjusting the reflection properties of the element and connected to the element in the surface of the substrate of the screen. An independent claim is also included for a process for controlling the screen. Preferred Features: The surface of the substrate has a matrix-like arrangement with elements whose reflection properties can be adjusted by the control unit.

公开(公告)号：DE102004019595A1

公开(公告)日：2005-11-10

申请号：DE102004019595

申请日：2004-04-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： LESCHOK ANDRE ,  VERHOEVEN MARTIN ,  BRATT GARY

IPC: G03B9/02 ,  G03F7/20

Abstract: A projection optic system for producing fine detail images, e.g. for photolithography for the production of semiconductors, integrated circuits etc., has the beam modulated by a filter (1) with a pattern of opaque and transmitting areas. The invention describes additional areas which are partially transmitting. The filter has a quartz substrate (40) which a has thick coating (42) as non transmitting areas as well as a thinner (48) layer for partial transmission and cleared areas (46) for non restricted.