公开(公告)号：JP2006024951A

公开(公告)日：2006-01-26

申请号：JP2005200964

申请日：2005-07-08

Applicant: Infineon Technologies Ag ,  インフィネオン テクノロジーズ アクチエンゲゼルシャフト

Inventor： ILICALI GUERKAN ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG

IPC: H01L29/786 ,  H01L21/02 ,  H01L21/336 ,  H01L27/12

CPC classification number: H01L29/66772 ,  H01L29/66628 ,  H01L29/78618 ,  H01L29/78648

Abstract: PROBLEM TO BE SOLVED: To provide a planar self-alignment double-gate transistor by a known, simple, cost-effective manufacturing method. SOLUTION: The manufacturing method includes a step for prescribing an active region on an SOI substrate; a step for forming a first gate region 206 on the SOI substrate; a step for forming a source/drain region made of silicon germanium in the active region; a step for forming a channel region 203 from a silicon layer on the SOI substrate; a step for forming a layer 311 having a plane on the SOI substrate, the source/drain region, and the first gate region 206; a step for connecting a wafer in which a silicon oxide 413 is formed on the plane; and a step for forming a second gate region 517 facing the first gate region 206. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：通过已知的，简单的，成本有效的制造方法来提供平面自对准双栅极晶体管。 解决方案：制造方法包括在SOI衬底上规定有源区的步骤; 在SOI衬底上形成第一栅极区域206的步骤; 用于在有源区中形成由硅锗制成的源/漏区的步骤; 从SOI衬底上的硅层形成沟道区203的步骤; 用于在SOI衬底，源极/漏极区域和第一栅极区域206上形成具有平面的层311的步骤; 连接在该平面上形成有氧化硅413的晶片的工序; 以及形成面对第一栅极区域206的第二栅极区域517的步骤。版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2006024950A

公开(公告)日：2006-01-26

申请号：JP2005200961

申请日：2005-07-08

Applicant: Infineon Technologies Ag ,  インフィネオン テクノロジーズ アクチエンゲゼルシャフト

Inventor： ILICALI GUERKAN ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG

IPC: H01L29/786

CPC classification number: H01L29/6656 ,  H01L29/66484 ,  H01L29/7831

Abstract: PROBLEM TO BE SOLVED: To provide a layer structure used as a double-gate field effect transistor, and to provide a method for manufacturing the layer structure.
SOLUTION: A porous silicon layer is formed on an auxiliary substrate as a sacrifice layer. A first semiconductor layer and a first electric insulating layer are successively formed on the sacrifice layer. On the first electric insulating layer, a conductive layer is formed for laterally forming a pattern. The laterally pattern-formed conductive layer is used as a common mask for laterally pattern-forming the first electric insulating layer, the sacrifice layer, and the first semiconductor layer. A semiconductor section is formed adjacent to the sidewall of the pattern-formed sacrifice layer and that of the first pattern-formed semiconductor layer. A substrate is fixed to the upper portion of the pattern-formed conductive layer, and the material of the auxiliary substrate is removed, thus exposing the sacrifice layer. The sacrifice layer is selectively removed, thus forming a trench. In the trench, a second electric insulating layer is formed, and a conductive section is formed on the second electric insulating layer.
COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供用作双栅极场效应晶体管的层结构，并提供一种用于制造层结构的方法。 解决方案：在辅助衬底上形成多孔硅层作为牺牲层。 在牺牲层上依次形成第一半导体层和第一电绝缘层。 在第一电绝缘层上形成用于横向形成图案的导电层。 横向图案形成的导电层用作用于横向图案形成第一电绝缘层，牺牲层和第一半导体层的通用掩模。 在图案形成的牺牲层和第一图案形成的半导体层的侧壁附近形成半导体部分。 将基板固定到图案形成的导电层的上部，并且去除辅助基板的材料，从而暴露牺牲层。 选择性地去除牺牲层，从而形成沟槽。 在沟槽中，形成第二电绝缘层，在第二电绝缘层上形成导电部。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：WO2004023557A3

公开(公告)日：2004-09-10

申请号：PCT/EP0309296

申请日：2003-08-21

Applicant: INFINEON TECHNOLOGIES AG ,  HOFMANN FRANZ ,  LANDGRAF ERHARD ,  LUYKEN RICHARD JOHANNES ,  SCHULZ THOMAS ,  SPECHT MICHAEL

Inventor： HOFMANN FRANZ ,  LANDGRAF ERHARD ,  LUYKEN RICHARD JOHANNES ,  SCHULZ THOMAS ,  SPECHT MICHAEL

IPC: H01L21/20 ,  H01L21/28 ,  H01L21/336 ,  H01L21/8246 ,  H01L27/10 ,  H01L27/115 ,  H01L29/73 ,  H01L29/76 ,  H01L29/792

CPC classification number: H01L29/7926 ,  H01L21/28282 ,  H01L27/115 ,  H01L27/11568 ,  H01L29/66833 ,  H01L29/792 ,  H01L29/7923

Abstract: The invention relates to a semiconductor memory with a number of memory cells, whereby each of the memory cells comprises four vertical memory transistors with trapping layers. The shallower contact regions are embodied in a semiconductor region running at an angle to the lines and gaps of the cell field, whereby the gate electrode preferably runs on the stage lateral surfaces of the shallower semiconductor region. A memory density of 1-2F per bit may thus be achieved.

Abstract translation: 本发明涉及具有多个存储单元的半导体存储器，每个存储单元包括具有俘获层的四个垂直存储晶体管。 较高的接触区形成在倾斜于单元阵列的行和列延伸的较高半导体区中，其中栅电极优选在较高半导体区的阶梯侧表面上被引导。 以这种方式可以实现每比特1-2F 2的存储密度。

公开(公告)号：WO0175151A3

公开(公告)日：2002-04-18

申请号：PCT/DE0101244

申请日：2001-03-29

Applicant: INFINEON TECHNOLOGIES AG ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES

Inventor： HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES

IPC: G01N33/483 ,  C12M1/00 ,  C12Q1/68 ,  G01N27/02 ,  G01N27/07 ,  G01N27/12 ,  G01N27/22 ,  G01N33/53 ,  G01N33/543 ,  G01N33/566 ,  G01N27/327

CPC classification number: G01N33/5438 ,  C12Q1/6825 ,  G01N27/3276 ,  C12Q2565/607

Abstract: The invention relates to electrodes which are provided with molecules that can bind macromolecular biopolymers. A first electric measurement is carried out on the electrodes. A medium is contacted to said electrodes in such a way that biopolymers can specifically bind to first molecules or second molecules which are applied to the electrodes, when macromolecular biopolymers are present in the medium. Unbound first or second molecules are removed from the respective electrode and a second electric measurement is carried out. The macromolecular biopolymers are detected according to the measurements.

Abstract translation: 电极被设置有能够结合大分子的生物聚合物分子。 这是在电极进行第一电测量。 的介质与在接触电极上，使得在存在于生物聚合物大分子的事件介质这些分子施加能够特异性结合到所述电极的第一或第二分子接触。 未结合的第一或第二分子从相应的电极移除，和它被执行的第二电测量。 根据测量，检测大分子生物聚合物。

公开(公告)号：WO0213284A2

公开(公告)日：2002-02-14

申请号：PCT/DE0103037

申请日：2001-08-09

Applicant: INFINEON TECHNOLOGIES AG ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG

Inventor： HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG

IPC: H01L23/52 ,  G11C13/02 ,  H01L21/3205 ,  H01L21/768 ,  H01L27/10 ,  H01L27/28 ,  H01L35/24 ,  H01L45/00 ,  H01L51/05 ,  H01L51/20 ,  H01L27/00

CPC classification number: H01L27/28 ,  B82Y10/00 ,  G11C13/0014 ,  G11C13/0016 ,  G11C2213/77 ,  H01L51/0575

Abstract: A memory element with organic material comprises two metallised layers, arranged one on top of the other, with first lines and second lines which are arranged to intersect with each other. A channel is formed at the intersections between the first line and the second line, which overlaps the first line partially and completely overlaps the second line. The channels are filled with a filling material, the electrical conductivity of which may be altered by an applied electrical voltage.

Abstract translation: 有机材料存储元件具有两个金属化层，一个在另一个的上方设置有彼此交叉布置的第一线和第二线。 在每种情况下，在第一条线和第二条线之间的交叉处形成沟槽，其与第一条线部分地完全重叠并且与第二条线完全重叠。 沟槽填充有电导率随所施加的电压而变化的填充物。

公开(公告)号：WO2006005321A3

公开(公告)日：2006-02-23

申请号：PCT/DE2005001209

申请日：2005-07-08

Applicant: INFINEON TECHNOLOGIES AG ,  ILICALI GUERKAN ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG

Inventor： ILICALI GUERKAN ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG

IPC: H01L21/762 ,  H01L21/84 ,  H01L27/12

CPC classification number: H01L27/1203 ,  H01L21/76275 ,  H01L21/76283 ,  H01L21/84 ,  H01L29/78648

Abstract: The invention relates to a substrate comprising a buried layer. According to the invention, a silicon carrier wafer has a buried first silicon-germanium-carbon layer, on which a silicon layer is configured.

Abstract translation: 具有掩埋层的衬底在硅载体晶片上具有其上形成有硅层的掩埋的第一硅 - 锗 - 碳层。

公开(公告)号：WO03088310A2

公开(公告)日：2003-10-23

申请号：PCT/DE0301281

申请日：2003-04-16

Applicant: INFINEON TECHNOLOGIES AG ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG ,  SPECHT MICHAEL ,  STAEDELE MARTIN

Inventor： HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES ,  ROESNER WOLFGANG ,  SPECHT MICHAEL ,  STAEDELE MARTIN

IPC: H01L29/06 ,  H01L21/02 ,  H01L21/20 ,  H01L21/265 ,  H01L21/336 ,  H01L21/762 ,  H01L21/8234 ,  H01L27/08 ,  H01L27/088 ,  H01L27/12 ,  H01L29/786 ,  H01L

CPC classification number: H01L21/76262 ,  H01L21/76251

Abstract: The invention relates to a substrate (600) which is provided with a support layer (501). An insulator layer (502) is applied to the support layer (501), comprising at least two areas having respectively different thicknesses. A semi-conductor layer (303) having an FD-area (304) and a PD-area (305) is applied to the surface of the insulating layer (502), comprising a planar surface. The planar surface is the surface which is opposite the insulating layer (502).

Abstract translation: 本发明提供一种基板（600），其包括载体层（501）。 其中的绝缘层（502）被施加，包括各自具有不同厚度的至少两个区域的载体层（501）上。 在绝缘体层的表面（502）是与FD区域（304）和PD区域（305）的半导体层（303）被施加，其具有平坦表面，所述平坦表面与所述表面的绝缘体层（502） 对面。

公开(公告)号：WO02090573A3

公开(公告)日：2003-04-10

申请号：PCT/DE0201700

申请日：2002-05-10

Applicant: INFINEON TECHNOLOGIES AG ,  FREY ALEXANDER ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES

Inventor： FREY ALEXANDER ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES

IPC: C12Q1/00 ,  G01N33/543 ,  C12Q1/68

CPC classification number: C12Q1/00 ,  G01N33/54373 ,  G01N33/5438

Abstract: The biochip comprises a substrate, at least one sensor, arranged on or in the substrate and an electrically conducting permeation layer, arranged at a given, non-zero separation from the surface of the substrate, to which an electrical voltage may be applied. The biochip arrangement may be used, for example, as a DNA sensor, whereby a receptor molecule, immobilised on the sensor electrode, hybridises a DNA molecule and thus an electrical sensor signal which may be drawn from between sensor electrodes, is influenced in a characteristic manner.

Abstract translation: 生物芯片组件包括一基板，至少一个设置在上或在衬底传感器和导电渗透层，其从所述衬底的表面布置在预定的非零的距离，并且其中，电电压可以被施加到。 生物芯片布置是有用的，例如，通过固定的捕获分子的DNA传感器杂交的DNA分子上的传感器电极，因此所涉及的传感器电极之间，可移动的电传感器信号特征的影响。

公开(公告)号：WO0248396A3

公开(公告)日：2003-09-04

申请号：PCT/DE0104719

申请日：2001-12-14

Applicant: INFINEON TECHNOLOGIES AG ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES ,  STEIBL MARTIN ,  SCHINDLER-BAUER PETRA THERESIA

Inventor： HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES ,  STEIBL MARTIN ,  SCHINDLER-BAUER PETRA THERESIA

IPC: C12Q1/68

CPC classification number: C12Q1/6825

Abstract: The sensor for detecting macromolecular biomolecules comprises a radiation detector and a radiolucent adhesive layer, which is arranged above the radiosensitive side of the radiation detector and which is provided as to enable scavenger molecules to bind to the adhesive layer. The existence of macromolecular biomolecules, which are complementary or specific to the structure of the scavenger molecules, in the solution to be examined can be concluded based on the evaluation of radiation detector output signals.

Abstract translation: 用于检测生物分子的大分子所述传感器包括在所述strahlunsempfinlichen Strahlunsdetektorsstrahlunsdurchlässige粘合剂层的一侧上的辐射检测器和布置被形成为使得所述捕获分子可以附着到粘合剂层上。 基于输出信号的Ausertung Strahlunsdetektor-可以得出结论，待检查的，以在溶液中的捕获分子互补或特定高分子生物分子的结构的存在。

公开(公告)号：WO02074985A3

公开(公告)日：2003-05-08

申请号：PCT/DE0200868

申请日：2002-03-12

Applicant: INFINEON TECHNOLOGIES AG ,  HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES

Inventor： HOFMANN FRANZ ,  LUYKEN RICHARD JOHANNES

IPC: G01N33/53 ,  C12Q1/42 ,  C12Q1/44 ,  C12Q1/48 ,  C12Q1/68 ,  G01N27/02 ,  G01N33/543 ,  G01N33/566 ,  C12Q1/00 ,  G01N33/68

CPC classification number: G01N33/5438 ,  C12Q1/6825 ,  C12Q1/6837 ,  C12Q2565/543 ,  C12Q2565/607

Abstract: The invention relates to a method of detecting macromolecular biopolymers by means of an electrode arrangement that comprises a first and a second electrode. The inventive method is characterized by carrying out a first electrical measurement on the electrodes. In a further step, a solution to be examined, which may contain the macromolecular biopolymers to be detected, is contacted with the electrode arrangement. In another step, the macromolecular biopolymers to be detected that are contained it the solution to be examined are bound to the scavenger molecules on the first and on the second electrode and the electrode arrangement is contacted with a reagent to increase conductivity of the macromolecular biopolymers, said reagent binding to the macromolecular biopolymers and bestowing them with electroconductivity. A second electrical measurement is carried out on the electrodes and the macromolecular biopolymers are detected on the basis of the comparison of the results of the two electrical measurements on the electrodes.

Abstract translation: 在该方法中，电极组件被插入时，其具有第一和第二电极。 在该方法中，在所述电极的第一电进行测量。 在另一步骤中，要被检查的溶液被带入与所述电极组件，其中，待检测的溶液可以含有大分子生物聚合物接触。 在进一步的步骤中，在被检查溶液被束缚包含待检测的大分子生物聚合物以在第一和第二电极以及在电极组件中，捕捉分子被带入接触用试剂以增加大分子的生物聚合物的导电性，其结合到大分子生物聚合物 这赋予导电性。 随后，第二电测量是在所述电极进行和大分子生物聚合物被检测取决于在电极处的两个电测量结果的比较。