公开(公告)号：WO0146664A3

公开(公告)日：2001-12-27

申请号：PCT/EP0012672

申请日：2000-12-13

Applicant: INFINEON TECHNOLOGIES AG ,  AIGNER ROBERT ,  MICHAELIS SVEN ,  BRAUER MICHAEL ,  PLOETZ FLORIAN

Inventor： AIGNER ROBERT ,  MICHAELIS SVEN ,  BRAUER MICHAEL ,  PLOETZ FLORIAN

IPC: G01P15/08 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  H01L21/301 ,  H01L29/84

CPC classification number: B81B7/007 ,  B81C1/00888 ,  G01P1/023 ,  G01P2015/0828 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49204 ,  Y10T29/49222 ,  Y10T29/49798 ,  Y10T29/49813 ,  Y10T83/02 ,  Y10T83/0581

Abstract: A micromechanical structure (17) disposed on a base body (1) requires protection from environmental influences by means of a covering (2) while at the same time electrical contacts (9) for connecting the micromechanical structure are required. The inventive method makes it possible to bare the electric contact (9) by partially (19) or completely (20) sawing through the structure.

Abstract translation: 布置在基体（1）上的微机械结构（17）需要通过覆盖体（2）保护免受环境影响。 此外，电触点（9）对于接触微机械结构是必需的。 通过熟练地执行缩进（19）和Durchsägung（20），可以暴露电触点（9）。

公开(公告)号：DE50007326D1

公开(公告)日：2004-09-09

申请号：DE50007326

申请日：2000-12-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  MICHAELIS SVEN ,  BRAUER MICHAEL ,  PLOETZ FLORIAN

IPC: G01P15/08 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  H01L21/301 ,  H01L29/84

Abstract: A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact.

公开(公告)号：AT272845T

公开(公告)日：2004-08-15

申请号：AT00993537

申请日：2000-12-13

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  MICHAELIS SVEN ,  BRAUER MICHAEL ,  PLOETZ FLORIAN

IPC: G01P15/08 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  H01L21/301 ,  H01L29/84

Abstract: A micromechanical structure is described which is disposed on a base body and requires protection from environmental influences by a covering body. Furthermore, electrical contacts are necessary for establishing contacts for the micromechanical structure. By skillfully carrying out a sawing-into operation and a sawing-through operation, it is possible to expose the electrical contact.

公开(公告)号：DE19962231A1

公开(公告)日：2001-07-12

申请号：DE19962231

申请日：1999-12-22

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  PLOETZ FLORIAN ,  MICHAELIS SVEN ,  BRAUER MICHAEL

IPC: G01P15/08 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  H01L21/301 ,  H01L29/84 ,  B81C3/00

Abstract: A micromechanical structure (17) disposed on a base body (1) requires protection from environmental influences by means of a covering (2) while at the same time electrical contacts (9) for connecting the micromechanical structure are required. The inventive method makes it possible to bare the electric contact (9) by partially (19) or completely (20) sawing through the structure.

公开(公告)号：DE10004393C1

公开(公告)日：2002-02-14

申请号：DE10004393

申请日：2000-02-02

Applicant: INFINEON TECHNOLOGIES AG

Inventor： AIGNER ROBERT ,  PLOETZ FLORIAN ,  MICHAELIS SVEN

IPC: B81B3/00 ,  H01H1/20 ,  H01H59/00

Abstract: A microrelay has a switching part which is pivotably suspended on a substrate and can be moved into two alternative switching states like a rocker, by electrostatic attraction through the use of suitably attached electrodes. The switching function is brought about by electrodes which are fastened to the substrate above the rocker being shorted by metallizations or contact electrodes on an upper side of the switching part.