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公开(公告)号：DE102005017516B3
公开(公告)日：2007-01-25
申请号：DE102005017516
申请日：2005-04-15
Applicant: INFINEON TECHNOLOGIES AG
Inventor： RENNER KERSTIN , NOELSCHER CHISTOPH , MUELDERS THOMAS
IPC: G03F7/20
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