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公开(公告)号：DE60121292D1
公开(公告)日：2006-08-17
申请号：DE60121292
申请日：2001-04-02
Applicant: INFINEON TECHNOLOGIES AG
Inventor： GLASHAUSER WALTER , UTESS BENNO , PURATH ANDREAS DR
IPC: B24B49/16 , B24B37/04 , B24B53/00 , B24B53/007 , H01L21/304
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公开(公告)号：DE60121292T2
公开(公告)日：2007-07-05
申请号：DE60121292
申请日：2001-04-02
Applicant: INFINEON TECHNOLOGIES AG
Inventor： GLASHAUSER WALTER , UTESS BENNO , PURATH ANDREAS DR
IPC: B24B49/16 , B24B37/04 , B24B53/00 , B24B53/007 , H01L21/304
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