公开(公告)号：DE10248224B4

公开(公告)日：2005-08-04

申请号：DE10248224

申请日：2002-10-16

Applicant: INFINEON TECHNOLOGIES AG

Inventor： ROESSIGER MARTIN ,  STAECKER JENS ,  SCHEDEL THORSTEN

IPC: H01L23/544 ,  G03F9/00 ,  G03F7/20

公开(公告)号：DE10253919B4

公开(公告)日：2004-09-23

申请号：DE10253919

申请日：2002-11-19

Applicant: INFINEON TECHNOLOGIES AG

Inventor： ROESSIGER MARTIN ,  SCHEDEL THORSTEN

IPC: G03F7/20 ,  G03B27/32 ,  H01L21/027 ,  H01L21/68 ,  G03F7/207

Abstract: The unevennesses of a chuck are measured at various positions and are stored, as discrepancies from an idealized plane, in a databank. The measured discrepancies are used to calculate corrections for the predetermined settings for the focus distance and/or the tilt of the chuck. These corrections are in each case used differently for adjusting the respective exposure of the exposure areas.

公开(公告)号：DE10248224A1

公开(公告)日：2004-05-13

申请号：DE10248224

申请日：2002-10-16

Applicant: INFINEON TECHNOLOGIES AG

Inventor： ROESSIGER MARTIN ,  STAECKER JENS ,  SCHEDEL THORSTEN

IPC: H01L23/544 ,  G03F9/00 ,  G03F7/20

公开(公告)号：DE10253919A1

公开(公告)日：2004-07-08

申请号：DE10253919

申请日：2002-11-19

Applicant: INFINEON TECHNOLOGIES AG

Inventor： ROESSIGER MARTIN ,  SCHEDEL THORSTEN

IPC: G03F7/20 ,  G03B27/32 ,  H01L21/027 ,  H01L21/68 ,  G03F7/207

Abstract: The unevennesses of a chuck are measured at various positions and are stored, as discrepancies from an idealized plane, in a databank. The measured discrepancies are used to calculate corrections for the predetermined settings for the focus distance and/or the tilt of the chuck. These corrections are in each case used differently for adjusting the respective exposure of the exposure areas.