公开(公告)号：DE19948569A1

公开(公告)日：2001-04-19

申请号：DE19948569

申请日：1999-10-08

Applicant: INFINEON TECHNOLOGIES AG

Inventor： SCHELS ARMIN ,  FISCHER THOMAS

IPC: G05B13/02 ,  G05B23/02 ,  H01L21/00 ,  G05B13/00

Abstract: The method involves determining various measurement data for a number of measurands. Based on the measurement data, the measurand is allocated a priority that indicates the significance of the measurand to the semiconductor manufacturing process. Measurands with the highest priority are identified and selected. To produce the priority, a neural network is used. Training data may be generated by classifying measurement data using a suitable semiconductor analysis method into perfect and imperfect processes. The neural network learns to distinguish between perfect and imperfect processes.

公开(公告)号：DE19948569C2

公开(公告)日：2001-09-13

申请号：DE19948569

申请日：1999-10-08

Applicant: INFINEON TECHNOLOGIES AG

Inventor： SCHELS ARMIN ,  FISCHER THOMAS

IPC: G05B13/02 ,  G05B23/02 ,  H01L21/00 ,  G05B13/00