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公开(公告)号：DE502004007852D1
公开(公告)日：2008-09-25
申请号：DE502004007852
申请日：2004-06-15
Applicant: INFINEON TECHNOLOGIES AG
Inventor： LEHMANN VOLKER , STENGEL REINHARD , SCHAEFER HERBERT
IPC: H01L23/473 , H01L21/306 , H01L21/3063 , H01L23/427
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