公开(公告)号：WO2004010220A8

公开(公告)日：2005-04-21

申请号：PCT/EP0307494

申请日：2003-07-10

Applicant: STEAG HAMA TECH AG ,  INFINEON TECHNOLOGIES AG ,  SCHWERSENZ ANATOL ,  SAULE WERNER ,  NOERING ANDREAS ,  DRESS PETER ,  BURGEL CHRISTIAN ,  TSCHINKL MARTIN ,  STROBL MARLENE

Inventor： SCHWERSENZ ANATOL ,  SAULE WERNER ,  NOERING ANDREAS ,  DRESS PETER ,  BURGEL CHRISTIAN ,  TSCHINKL MARTIN ,  STROBL MARLENE

IPC: G03F7/30 ,  B05B1/14 ,  B05C5/00 ,  H01L21/027 ,  G03D5/04

CPC classification number: B05C5/005

Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly (22) for applying a liquid to a substrate, said assembly having a nozzle body (26) comprising a plurality of nozzles (36) that are substantially arranged in a line and a guide plate (28) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles (36) above the lower edge are directed towards the guide plate (28) in such a way that a film of liquid forms on the guide plate (28) and flows over the lower edge (64).

Abstract translation: 对于提供了一种用于将液体施加到基底上的快速，均匀且尽可能不受力，根据本发明将流体施加到基板，喷嘴装置（22），该装置包括具有在一条线上的多个基本的喷嘴体（26） 排列的喷嘴（36）和它大致垂直的直的下边缘伸展的挡板（28），并且其中被引导的喷嘴（36）的挡板（28）的下边缘的上方，以使在挡板的液膜 （28），其在所述下边缘（64）流出。

公开(公告)号：CA2492825A1

公开(公告)日：2004-01-29

申请号：CA2492825

申请日：2003-07-10

Applicant: STEAG HAMATECH AG ,  INFINEON TECHNOLOGIES AG

Inventor： NORING ANDREAS ,  TSCHINKL MARTIN ,  BURGEL CHRISTIAN ,  DRESS PETER ,  SCHWERSENZ ANATOL ,  SAULE WERNER ,  STROBL MARLENE

IPC: G03F7/30 ,  B05B1/14 ,  B05C5/00 ,  H01L21/027 ,  G03D5/04

Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly (22) for applying a liquid to a substrate, said assembly having a nozzle body (26) comprising a plurality of nozzles (36) that are substantially arranged in a line and a guide plate (28 ) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles (36) above the lower edge are direct ed towards the guide plate (28) in such a way that a film of liquid forms on th e guide plate (28) and flows over the lower edge (64).

公开(公告)号：DE10344645A1

公开(公告)日：2005-05-25

申请号：DE10344645

申请日：2003-09-25

Applicant: INFINEON TECHNOLOGIES AG

Inventor： STROBL MARLENE ,  SCHUMACHER KARL ,  STAECKER JENS ,  BRUCH JENS UWE ,  HOMMEN HEIKO

IPC: G03B27/42 ,  G03F1/00 ,  G03F7/20

Abstract: The mutually associated structure patterns, which are provided on one mask, or a plurality of masks for a double or multiple exposure can be received by the mask substrate holder. The mask substrate holder has two receiving stations one for each of the masks. Alternatively, both structure patterns for the double exposure are formed on one mask. The substrate holder has one receiving station. The substrate holder, is displaced from the section including first structure pattern to the second, between the two exposure operations, without the masks having to be loaded or unloaded, and realigned.

公开(公告)号：AT373836T

公开(公告)日：2007-10-15

申请号：AT03764969

申请日：2003-07-10

Applicant: STEAG HAMATECH AG ,  INFINEON TECHNOLOGIES AG

Inventor： SCHWERSENZ ANATOL ,  SAULE WERNER ,  NOERING ANDREAS ,  DRESS PETER ,  BUERGEL CHRISTIAN ,  TSCHINKL MARTIN ,  STROBL MARLENE

IPC: G03D5/04 ,  G03F7/30 ,  B05B1/14 ,  B05C5/00 ,  H01L21/027

Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly ( 22 ) for applying a liquid to a substrate, said assembly having a nozzle body ( 26 ) comprising a plurality of nozzles ( 36 ) that are substantially arranged in a line and a guide plate ( 28 ) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles ( 36 ) above the lower edge are directed towards the guide plate ( 28 ) in such a way that a film of liquid forms on the guide plate ( 28 ) and flows over the lower edge ( 64 ).

公开(公告)号：DE10232984A8

公开(公告)日：2004-07-08

申请号：DE10232984

申请日：2002-07-19

Applicant: STEAG HAMATECH AG ,  INFINEON TECHNOLOGIES AG

Inventor： SCHWERSENZ ANATOL ,  SAULE WERNER ,  NOERING ANDREAS ,  DRES PETER ,  BUERGEL CHRISTIAN ,  TSCHINKL MARTIN ,  STROBL MARLENE

IPC: G03F7/30 ,  B05B1/14 ,  B05C5/00 ,  H01L21/027 ,  B05B1/04 ,  B05B1/20 ,  B05B1/26

Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly ( 22 ) for applying a liquid to a substrate, said assembly having a nozzle body ( 26 ) comprising a plurality of nozzles ( 36 ) that are substantially arranged in a line and a guide plate ( 28 ) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles ( 36 ) above the lower edge are directed towards the guide plate ( 28 ) in such a way that a film of liquid forms on the guide plate ( 28 ) and flows over the lower edge ( 64 ).

公开(公告)号：CA2492825C

公开(公告)日：2010-09-28

申请号：CA2492825

申请日：2003-07-10

Applicant: STEAG HAMATECH AG ,  INFINEON TECHNOLOGIES AG

Inventor： SCHWERSENZ ANATOL ,  SAULE WERNER ,  NORING ANDREAS ,  DRESS PETER ,  BURGEL CHRISTIAN ,  TSCHINKL MARTIN ,  STROBL MARLENE

IPC: G03D5/04 ,  G03F7/30 ,  B05B1/14 ,  B05C5/00 ,  H01L21/027

Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly (22) for applying a liquid to a substrate, said assembly having a nozzle body (26) comprising a plurality of nozzles (36) that are substantially arranged in a line and a guide plate (28) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles (36) above the lower edge are directed towards the guide plate (28) in such a way that a film of liquid forms on the guide plate (28) and flows over the lower edge (64).

公开(公告)号：DE50308231D1

公开(公告)日：2007-10-31

申请号：DE50308231

申请日：2003-07-10

Applicant: STEAG HAMATECH AG ,  INFINEON TECHNOLOGIES AG

Inventor： SCHWERSENZ ANATOL ,  SAULE WERNER ,  NOERING ANDREAS ,  DRESS PETER ,  BUERGEL CHRISTIAN ,  TSCHINKL MARTIN ,  STROBL MARLENE

IPC: G03D5/04 ,  G03F7/30 ,  B05B1/14 ,  B05C5/00 ,  H01L21/027

Abstract: The aim of the invention is to achieve a rapid, homogeneous application of a liquid with as little force as possible to a substrate. To achieve this, the invention provides a nozzle assembly ( 22 ) for applying a liquid to a substrate, said assembly having a nozzle body ( 26 ) comprising a plurality of nozzles ( 36 ) that are substantially arranged in a line and a guide plate ( 28 ) that extends essentially in a vertical direction with a straight lower edge. According to the invention, the nozzles ( 36 ) above the lower edge are directed towards the guide plate ( 28 ) in such a way that a film of liquid forms on the guide plate ( 28 ) and flows over the lower edge ( 64 ).