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公开(公告)号：DE10214743A1
公开(公告)日：2004-11-04
申请号：DE10214743
申请日：2002-04-03
Applicant: INFINEON TECHNOLOGIES CORP , IBM
Inventor： KNORR ANDREAS , KUDELKA STEPHAN , MANDELMAN JACK , RAHN STEPHAN , TEWS HELMUT , WISE MICHAEL
IPC: H01L21/8242 , H01L29/94 , H01L27/108
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