Abstract:
A digital optical switch apparatus and method for manufacture. The apparatus includes a mirror assembly (112) coupled to a top cap (110) and to a bottom cap (114).
Abstract:
A digital optical switch apparatus and method for manufacture. The apparatus includes a mirror assembly (112) coupled to a top cap (110) and to a bottom cap (114).
Abstract:
The present invention provides a digital optical switch apparatus and process for manufacturing the apparatus. The apparatus includes a mirror assembly coupled to a top cap and to a bottom cap. The top and bottom caps each include one or more electrodes that, when energized with electrical energy, move a mirrored surface to one of a plurality of discrete positions. Mirror assemblies can be cascaded to create a packaged assembly having any multiple of discrete positions. The process includes planar micro-machining techniques to create isolated islands for electrical feed through. The process enables mechanical bonding of multiple tiers via a single bond region and through a bond-pad window.
Abstract:
A digital optical switch apparatus and method for manufacture. The apparatus includes a mirror assembly (112) coupled to a top cap (110) and to a bottom cap (114).