公开(公告)号：US20220320424A1

公开(公告)日：2022-10-06

申请号：US17310922

申请日：2020-12-14

Applicant: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES

Inventor： Qing LUO ,  Yaxin DING ,  Hangbing LV ,  Ming LIU

IPC: H01L45/00

Abstract: The disclosure discloses a selector and a preparation method thereof. The selector includes: a substrate 1; an alternating layer 2 provided on the substrate 1, the alternating layer 2 being alternately formed by a bottom electrode layer 21 and an insulating layer 22; the alternating layer 2 is provided with a U-shaped groove; a selective layer 3 and a dielectric layer 4 being sequentially deposited in a direction from an inner wall of the U-shaped groove to a center of the U-shaped groove; and a top electrode layer 5 is filled in a concave space defined by the dielectric layer 4. The selector and the preparation method according to one or more embodiments of the disclosure can address the technical problem of high leakage current of the selector in existing technology and provide a selector with low leakage current.