公开(公告)号：EP2240399A4

公开(公告)日：2014-05-28

申请号：EP09709574

申请日：2009-02-11

Applicant: INTEGRATED SENSING SYSTEMS INC

Inventor： SPARKS DOUGLAS RAY ,  PUTTY MICHAEL W ,  NAJAFI NADER ,  SMITH RICHARD THAYRE

IPC: B81B1/00 ,  B81B7/00 ,  F15C1/04 ,  G01N27/00 ,  G01N29/02 ,  G01N29/036 ,  H01L21/44

CPC classification number: G01F1/8477 ,  B01L3/5027 ,  G01F1/8409 ,  G01F1/8427 ,  G01F1/8445 ,  G01F1/8472 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/02818 ,  G01N2291/02836 ,  G01N2291/0422 ,  G01N2291/0426 ,  Y10T29/49002

Abstract: A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.