公开(公告)号：WO2009076287A3

公开(公告)日：2009-08-13

申请号：PCT/US2008085866

申请日：2008-12-08

Applicant: INTEGRATED SENSING SYSTEMS INC ,  SPARKS DOUGLAS RAY ,  SMITH RICHARD THAYRE ,  NAJAFI NADER

Inventor： SPARKS DOUGLAS RAY ,  SMITH RICHARD THAYRE ,  NAJAFI NADER

IPC: G01N33/00 ,  B81B7/00 ,  G01D21/02 ,  G01F17/00 ,  G01N27/00

CPC classification number: G01F1/8445 ,  G01N9/002

Abstract: A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device (10) having a micromachined tube (14) supported above a substrate (12), a tube passage (20) within a freestanding portion (16) of the tube (14), an inlet (36a) and outlet (36b) in fluidic communication with the tube passage (20) and an exterior of the microfluidic device (10), elements (22) for vibrating the freestanding portion (16) of the tube (14), and elements (24) for sensing movement of the freestanding portion (16) of the tube (14) so as to measure the vibration frequency and/or deflection of the freestanding portion (16) and produce therefrom at least one output corresponding to a property of a fluid flowing through the tube passage (20). The system and method further entail placing the microfluidic device (10) in a flowing fluid so that a fraction of the fluid enters the tube passage (20), and processing the output of the device (10) to compute a property of the fluid.

Abstract translation: 一种用于感测流动流体的性质的流体感测系统和方法。 该系统和方法需要一个微流体装置（10），该微流体装置（10）具有支撑在衬底（12）上方的微加工管（14），管（14）的独立部分（16）内的管通道（20），入口 ）和出口（36b）与管通道（20）和微流体装置（10）的外部流体连通，用于振动管（14）的独立部分（16）的元件（22）和元件（24 ），用于感测所述管（14）的所述独立部分（16）的运动，以测量所述独立部分（16）的振动频率和/或偏转，并从其产生至少一个对应于流体流动性质的输出 通过管道（20）。 该系统和方法还需要将微流体装置（10）放置在流动的流体中，使得流体的一部分进入管通道（20），并且处理装置（10）的输出以计算流体的性质。

公开(公告)号：WO2009051811A3

公开(公告)日：2009-07-16

申请号：PCT/US2008011897

申请日：2008-10-17

Applicant: INTEGRATED SENSING SYSTEMS INC ,  NAJAFI NADER ,  SPARKS DOUGLAS RAY

Inventor： NAJAFI NADER ,  SPARKS DOUGLAS RAY

IPC: A61B5/00

CPC classification number: A61B5/0537 ,  A61B5/0031 ,  A61B5/14539 ,  A61B5/6864 ,  A61B5/6882

Abstract: A system for monitoring a charge-based physiological parameter within an internal organ of a living body, and a sensor adapted to be implanted in the living body and an organ therein. The sensor includes sensing elements adapted to sense the charge-based physiological parameter within the organ, and the sensing elements include at least first and second sensing elements that are electrically conductive, aligned, spaced apart and exposed at the exterior of the sensor. The sensor further includes a device for passing an alternating current from the first to the second sensing elements through an ionic solution contacting the sensing elements. The sensor also includes a device for generating a signal corresponding to the impedance of the ionic solution based on the alternating current.

Abstract translation: 一种用于监测活体内部器官内的基于电荷的生理参数的系统以及适于植入活体和其中的器官的传感器。 传感器包括适于感测器官内基于电荷的生理参数的感测元件，并且感测元件包括至少第一感测元件和第二感测元件，第一感测元件和第二感测元件在传感器的外部导电，对准，间隔开并暴露。 传感器还包括用于使交流电流从第一传感元件传递到第二传感元件的装置，该交流电流通过与传感元件接触的离子溶液。 传感器还包括用于基于交流电流产生与离子溶液的阻抗相对应的信号的装置。

公开(公告)号：EP2220486A4

公开(公告)日：2014-05-07

申请号：EP08860758

申请日：2008-12-08

Applicant: INTEGRATED SENSING SYSTEMS INC

Inventor： SPARKS DOUGLAS RAY ,  SMITH RICHARD THAYRE ,  NAJAFI NADER

IPC: G01N33/00 ,  B81B7/00 ,  G01D21/02 ,  G01F1/84 ,  G01F17/00 ,  G01N9/00 ,  G01N27/00

CPC classification number: G01F1/8445 ,  G01N9/002

Abstract: A fluid sensing system and method for sensing properties of a flowing fluid. The system and method entail a microfluidic device having a micromachined tube supported above a substrate, a tube passage within a freestanding portion of the tube, an inlet and outlet in fluidic communication with the tube passage and an exterior of the microfluidic device, elements for vibrating the freestanding portion of the tube, and elements for sensing movement of the freestanding portion of the tube so as to measure the vibration frequency and/or deflection of the freestanding portion and produce therefrom at least one output corresponding to a property of a fluid flowing through the tube passage. The system and method further entail placing the microfluidic device in a flowing fluid so that a fraction of the fluid enters the tube passage, and processing the output of the device to compute a property of the fluid.

公开(公告)号：EP2240400A4

公开(公告)日：2017-05-10

申请号：EP09711269

申请日：2009-02-11

Applicant: INTEGRATED SENSING SYSTEMS INC

Inventor： SPARKS DOUGLAS RAY ,  SMITH RICHARD THAYRE ,  NAJAFI NADER

IPC: B81B1/00 ,  B81B7/00 ,  G01F1/84 ,  G01N9/00 ,  G01N9/06 ,  G01N11/16 ,  G01N33/00 ,  H01L21/00

CPC classification number: G01N11/16 ,  G01F1/8413 ,  G01F1/8418 ,  G01F1/8427 ,  G01F1/8431 ,  G01F1/844 ,  G01F1/8472 ,  G01N9/002

Abstract: A microelectromechanical system (MEMS) device and method for operating the device to determine a property of a fluid. The device has a tube that extends from a base and is spaced apart from a substrate surface for vibrational movement in a plane normal to the surface. The tube defines a continuous internal passage having a fluid inlet and fluid outlet fluidically connected to the base. A cantilevered member attached to a distal portion of the tube opposite the base is configured for vibrational movement relative to the distal portion. A drive electrode operable to induce vibrational movements in the tube and cantilevered member is disposed on the substrate surface. Sensing electrodes are disposed on the substrate surface for sensing Coriolis-induced deflections of the tube when vibrated, generating outputs from which a property of a fluid flowing through the tube can be determined.

Abstract translation: 一种用于操作该装置以确定流体性质的微机电系统（MEMS）装置和方法。 该装置具有从基座延伸并与衬底表面间隔开的管，用于在垂直于表面的平面中进行振动运动。 管限定具有流体连接到基座的流体入口和流体出口的连续内部通道。 附接到与基部相对的管的远端部分的悬臂构件被构造成用于相对于远端部分的振动运动。 可操作以在管和悬臂构件中引起振动运动的驱动电极设置在基板表面上。 感测电极设置在衬底表面上，用于在振动时感测科里奥利引起的管的偏转，产生可以确定流过管的流体的性质的输出。

公开(公告)号：EP2331454A4

公开(公告)日：2014-11-26

申请号：EP09747424

申请日：2009-05-13

Applicant: INTEGRATED SENSING SYSTEMS INC

Inventor： SPARKS DOUGLAS RAY

IPC: B81C1/00 ,  H01L21/02 ,  H01L23/12

CPC classification number: B81C1/00119 ,  B01L3/502707 ,  B81B2201/0214 ,  B81B2201/0278 ,  B81B2201/058 ,  G01F1/8445 ,  H01L24/94 ,  H01L2224/48091 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/16152 ,  H01L2924/3025 ,  Y10T137/2191 ,  Y10T137/2224 ,  H01L2924/00014 ,  H01L2924/00

公开(公告)号：EP2240399A4

公开(公告)日：2014-05-28

申请号：EP09709574

申请日：2009-02-11

Applicant: INTEGRATED SENSING SYSTEMS INC

Inventor： SPARKS DOUGLAS RAY ,  PUTTY MICHAEL W ,  NAJAFI NADER ,  SMITH RICHARD THAYRE

IPC: B81B1/00 ,  B81B7/00 ,  F15C1/04 ,  G01N27/00 ,  G01N29/02 ,  G01N29/036 ,  H01L21/44

CPC classification number: G01F1/8477 ,  B01L3/5027 ,  G01F1/8409 ,  G01F1/8427 ,  G01F1/8445 ,  G01F1/8472 ,  G01N29/022 ,  G01N29/036 ,  G01N2291/02818 ,  G01N2291/02836 ,  G01N2291/0422 ,  G01N2291/0426 ,  Y10T29/49002

Abstract: A microelectromechanical system (MEMS) device and a method for operating the device to determine at least one property of a fluid. The device includes a base on a substrate and a tube structure extending from the base and spaced apart from a surface of the substrate. The tube structure includes at least one tube portion and more preferably at least a pair of parallel tube portions substantially lying in a plane, at least one continuous internal passage defined at least in part within the parallel tube portions, and an inlet and outlet of the internal passage fluidically connected to the base. A drive element is operable to induce vibrational movement in the tube structure in a plane of the tube structure and induce resonant vibrational movements in the tube portions. A sensing element senses the deflections of the tube portions when the tube structure is vibrated with the drive element.