公开(公告)号：AU2003218287A8

公开(公告)日：2003-10-13

申请号：AU2003218287

申请日：2003-03-19

Applicant: INTEL CORP

Inventor： BAR-SADEH EYAL ,  BERLINER GUY

IPC: H04R7/02

Abstract: A diaphragm includes a substrate having a hole and a sheet of material formed on the substrate and covering the hole. The sheet of material includes one or more corrugations that are substantially free of defects. A method of forming the diaphragm includes forming a corrugated surface free of stringers on the substrate, forming a layer of material on the corrugated surface, and processing the substrate to form the diaphragm including the layer of material.

公开(公告)号：AU2003218287A1

公开(公告)日：2003-10-13

申请号：AU2003218287

申请日：2003-03-19

Applicant: INTEL CORP

Inventor： BERLINER GUY ,  BAR-SADEH EYAL

IPC: H04R7/02 ,  G01L7/08

Abstract: A diaphragm includes a substrate having a hole and a sheet of material formed on the substrate and covering the hole. The sheet of material includes one or more corrugations that are substantially free of defects. A method of forming the diaphragm includes forming a corrugated surface free of stringers on the substrate, forming a layer of material on the corrugated surface, and processing the substrate to form the diaphragm including the layer of material.