公开(公告)号：AU2003256550A1

公开(公告)日：2004-02-02

申请号：AU2003256550

申请日：2003-07-11

Applicant: INTEL CORP A DELAWARE CORP A D

Inventor： MA QING ,  SHIM DONG

IPC: B81B3/00 ,  H03H9/02 ,  H03H9/05 ,  H03H9/25

Abstract: Microelectromechanical system (MEMS) apparatus and methods for surface acoustic wave (SAW) switching are disclosed. The apparatus includes a piezoelectric substrate having spaced apart input and output SAW transducers. A MEMS switch is arranged between the input and output SAW transducers The MEMS switch has a deformable member in electromagnetic communication with one or more actuation electrodes formed on or above the substrate. The deformable member is deformable to mechanically contact the substrate to deflect or absorb a SAW generated by the input SAW transducer.