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    Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices
    1.
    发明申请
    Robust multi-layered thin-film membrane for micro-electromechanical systems (MEMS) photonic devices 失效
    用于微机电系统（MEMS）光子器件的稳健的多层薄膜膜

    公开(公告)号：US20030045036A1

    公开(公告)日：2003-03-06

    申请号：US10062774

    申请日：2002-02-01

    Applicant: INTPAX, Inc.

    Inventor： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

    IPC: G02B026/00 ,  H01L021/00 ,  H01L021/84

    CPC classification number: G02B26/0833 ,  G02B6/122 ,  G02B26/001 ,  G02B2006/12104

    Abstract: This invention discloses a configuration of thin-film membrane. This thin-film membrane is freestanding, movable, and made of multiple layers of different materials such as silicon nitride, polycrystalline silicon or the combination of these two. This thin-film membrane can be actuated by external controlling forces such as electrostatic force. This thin-film membrane consists of odd number of layers, e.g., 1 layer, 3 layers, 5 layers, . . . etc. Moreover, the layer profile of this membrane is symmetric, e.g., the bottommost layer is made to be identical to the topmost layer, the next bottommost layer is made to be identical to the next topmost layer, so on and so forth.

    Abstract translation: 本发明公开了薄膜的结构。 该薄膜是独立的，可移动的，并且由多层不同的材料制成，例如氮化硅，多晶硅或这两者的组合。 该薄膜可以通过诸如静电力的外部控制力来致动。 该薄膜膜由奇数层组成，例如1层，3层，5层。 。 。 此外，该膜的层轮廓是对称的，例如，最底层与最顶层相同，下一个最下层被制成与下一个最上层相同，等等。

    Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications
    3.
    发明申请
    Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applications 失效
    通过离子注入为微光电机械系统（MOEMS）应用定义了牺牲区域

    公开(公告)号：US20020110948A1

    公开(公告)日：2002-08-15

    申请号：US10011350

    申请日：2001-11-12

    Applicant: INTPAX, Inc.

    Inventor： Liji Huang ,  Naiqian Han ,  Yahong Yao ,  Gaofeng Wang

    IPC: H01L027/15 ,  H01L031/12 ,  H01L033/00 ,  H01L021/265 ,  H01L021/00

    CPC classification number: B81C1/00047 ,  B81B2201/047 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00571 ,  B81C2201/0109 ,  B81C2201/0136

    Abstract: The present invention discloses an electro-optical device support on a substrate. The electro-optical device includes a sacrificial layer disposed on the substrate having a chamber-wall region surrounding and defining an optical chamber. The electro-optical device further includes a membrane layer disposed on top of the sacrificial layer having a chamber-removal opening surrounding and defining an electric tunable membrane for transmitting an optical signal therethrough. The electrically tunable membrane disposed on top of the optical chamber surrounded by the chamber wall regions. The chamber-wall region is doped with iondopants for maintaining the chamber-wall region for removal-resistance under a chamber-forming process performed through the chamber-removal opening. In a preferred embodiment, the chamber-wall region is a doped silicon dioxide region with carbon or nitrogen. In another preferred embodiment, the chamber-wall region is a nitrogen ion-doped SiNxOy region. In another preferred embodiment, the optical chamber is an etched chamber formed by etching through the chamber removal opening for etching off an etch-enhanced region surrounded by an etch-resistant region constituting the chamber wall.

    Abstract translation: 本发明公开了一种在基片上的电光装置支架。 电光装置包括设置在基板上的牺牲层，其具有围绕并限定光学室的室壁区域。 电光装置还包括设置在牺牲层顶部的膜层，其具有围绕并限定用于透射光信号的电可调膜的室去除开口。 设置在由室壁区域围绕的光学室的顶部上的电可调膜。 在室壁区域掺杂有离子掺杂剂，用于在通过室去除开口进行的室形成过程中保持室壁区域用于去除电阻。 在优选实施例中，室壁区域是具有碳或氮的掺杂二氧化硅区域。 在另一个优选的实施方案中，室壁区域是氮离子掺杂的SiN x O y区域。 在另一个优选实施例中，光学室是通过蚀刻通过室去除开口形成的蚀刻室，用于蚀刻由构成室壁的耐蚀刻区域围绕的蚀刻增强区域。

    Dynamic gain equalization system design with adaptive spectrum decomposition methodology
    4.
    发明申请
    Dynamic gain equalization system design with adaptive spectrum decomposition methodology 失效
    具有自适应频谱分解方法的动态增益均衡系统设计

    公开(公告)号：US20030156779A1

    公开(公告)日：2003-08-21

    申请号：US10177505

    申请日：2002-06-19

    Applicant: INTPAX, Inc.

    Inventor： Gaofeng Wang ,  Naiqian Han ,  Liji Huang

    IPC: G02B006/26 ,  G02B006/42

    CPC classification number: G02B6/12021 ,  G02B6/12033 ,  G02B6/266 ,  G02B6/293 ,  G02B6/29391 ,  G02B6/29395

    Abstract: The present invention discloses an optical gain equalization system for receiving and equalizing a multiple-channel input optical signal. The optical gain equalization system includes a cascaded array of tunable optical filters filtering the multiple-channel input optical signal and generating a plurality of sub-signals and a residual signal and each of the sub-signals transmitted over a mutually exclusive filter-specific spectrum-range while a combination of all the filter-specific spectrums dynamically covering the spectral portions of said multi-channel input optical signal where power equalizations are required, and all said filter-specific spectrums together with the residual signal spectrum substantially covering an entire spectral range of the multi-channel input optical signal. The gain equalization system further includes a corresponding array of variable optical attenuators (VOAs) each connected to one of a corresponding tunable optical filter for attenuating the sub-signal transmitted over the filter-specific spectrum range for generating an equalized sub-signal. And, the gain equalization system further includes a multiplexing means for receiving and multiplexing the equalized sub-signals generated by the array of variable optical attenuators (VOAs) and the residual signal for generating an equalized output optical signal.

    Abstract translation: 本发明公开了一种用于接收和均衡多通道输入光信号的光增益均衡系统。 光学增益均衡系统包括可调谐滤光器的级联阵列，其对多通道输入光信号进行滤波，并产生多个子信号和残留信号，并且每个子信号通过互斥滤波器特定频谱 - 范围，同时所有滤波器特定频谱的组合动态地覆盖需要功率均衡的所述多信道输入光信号的频谱部分，并且所有所述滤波器特定频谱与残留信号频谱一起基本上覆盖整个频谱范围 多通道输入光信号。 增益均衡系统还包括相应的可变光衰减器阵列（VOA），每个可变光衰减器连接到相应的可调光滤波器之一，用于衰减通过滤波器专用频谱范围传输的子信号，用于产生均衡的子信号。 并且，增益均衡系统还包括多路复用装置，用于接收和复用由可变光衰减器阵列产生的均衡的子信号和用于产生均衡的输出光信号的残余信号。

    Basic common optical cell configuration of dual cavities for optical tunable devices
    5.
    发明申请
    Basic common optical cell configuration of dual cavities for optical tunable devices 失效

    公开(公告)号：US20030137020A1

    公开(公告)日：2003-07-24

    申请号：US10165490

    申请日：2002-06-07

    Applicant: INTPAX, Inc.

    Inventor： Naiqian Han ,  Jidong Hou ,  Xiaoping Zhang ,  Liji Huang ,  Gaofeng Wang

    IPC: H01L029/82

    CPC classification number: H01S5/18366 ,  H01S5/0207

    Abstract: The present invention discloses a tunable optical device. The tunable optical device includes a tuning cavity having a tuning means provided for alternately bonding to at least two different tunable optical cells each comprising a tuning membrane wherein the tuning cavity disposed near the tuning membrane for moving the tuning membrane for tuning one of the at least two tunable optical cells bonded thereon. In a preferred embodiment, the tuning cavity further includes a first electrode disposed on the tuning membrane and a second electrode disposed on a substrate supporting the tuning cavity for applying a voltage to move the tuning membrane. In a preferred embodiment, the optical device further includes an optical device control circuit connected to the tuning means for controlling and moving the tuning membrane. In a preferred embodiment, the tuning cavity further includes through hole along an optical path for an optical transmission passing through the tunable membrane for providing an interface-free and ripple-free optical path for the optical transmission. In a preferred embodiment, the tunable optical cells constitute an optical filter for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical attenuator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical switch for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the tunable optical cells constitute an optical dispersion compensator for bonding to the tuning cavity and tunable by moving the tunable membrane. In a preferred embodiment, the optical device constitutes a micro-electro-mechanical system (MEMS) optical device manufactured by applying a micro-electro-mechanical system (MEMS) technology.

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