公开(公告)号：US20150033855A1

公开(公告)日：2015-02-05

申请号：US14518651

申请日：2014-10-20

Applicant: InSighTech, LLC

Inventor： Biao ZHANG ,  Tao JU

IPC: G01C19/5712 ,  G01P15/105

CPC classification number: G01P15/105 ,  B81B5/00 ,  B81C1/00357 ,  B81C3/001 ,  B81C2201/0197 ,  B81C2203/038 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5776 ,  G01P15/125 ,  G01R33/091 ,  G01R33/093 ,  G01R33/098

Abstract: A MEMS gyroscope is disclosed herein, wherein the MEMS gyroscope comprised a magnetic sensing mechanism and a magnetic source that is associated with the proof-mass. The magnetic sensing mechanism comprises multiple magnetic field sensors that are designated for sensing the magnetic field from a magnetic source so as to mitigate the problems caused by fabrication.

Abstract translation: 本文公开了一种MEMS陀螺仪，其中MEMS陀螺仪包括与检测质量相关联的磁感测机构和磁源。 磁感测机构包括多个磁场传感器，其被指定用于感测来自磁源的磁场，以便减轻由制造引起的问题。