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公开(公告)号：EP4530606A1
公开(公告)日：2025-04-02
申请号：EP23199747.9
申请日：2023-09-26
Applicant: Infineon Technologies AG
Inventor： HAUFF, Michael , TUMPOLD, David , MITTEREDER, Tobias , GHADERI, Mohammadamir , HAMPL, Stefan , SIGL, Alfred , SCHWÄGERL, Sebastian
Abstract: Examples provide a semiconductor device. The semiconductor device comprises a radiation element and a detection element. The radiation element comprises a radiation layer for radiating an electromagnetic wave. The detection element comprises a detection layer for detecting the electromagnetic wave. Further, the semiconductor device comprises a substrate and an interface layer. The interface layer is arranged between the radiation element and/or the detection element and the substrate. A thermal conductivity of the radiation element and/or the detection element is different from a thermal conductivity of the interface layer.
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公开(公告)号：EP4421477A1
公开(公告)日：2024-08-28
申请号：EP23158197.6
申请日：2023-02-23
Applicant: Infineon Technologies AG
Inventor： GLACER, Christoph , KRUMBEIN, Ulrich , MITTEREDER, Tobias , PAVIER, Mark , QI, Siyuan , RICHARD, Hugh , TUMPOLD, David , WESTMARLAND, Paul
IPC: G01N21/17 , G01N21/3504 , G01J3/02 , G01N21/61
CPC classification number: G01N21/3504 , G01N21/61 , G01N21/1702 , G01N2021/170420130101 , G01J3/02
Abstract: A package (100) for an optical radiation device (10; 10-1, 10-2) comprises a base structure (12) having arranged thereon the optical radiation device (10), an optically transparent lid element (14) bonded to the base structure (12) defining a cavity (16) between the base structure (12) and the lid element (14), and a bond structure (20) in a bonding region (22) between the base structure (12) and the lid element (14), wherein the bond structure (20) is arranged to provide an adhesive bond between the base structure (12) and the lid element, and wherein the bond structure (20) comprises a diffusion layer (20-1, 20-2) having a gas diffusive material or gas diffusive structure for providing a gas diffusion path (24) between the cavity (16) and the surrounding atmosphere (18).
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公开(公告)号：EP4407299A1
公开(公告)日：2024-07-31
申请号：EP23153376.1
申请日：2023-01-26
Applicant: Infineon Technologies AG
Inventor： GRILLE, Thomas , STOCKER, Gerald , OSTERMANN, Thomas , THAKKAR, Pooja , TUMPOLD, David , JANNESARI, Reyhaneh
IPC: G01N21/3504 , G01N21/3577 , G01N21/552 , G01N33/00
CPC classification number: G01N21/552 , G01N21/3504 , G01N21/3577 , G01N2201/068620130101 , G01N33/004
Abstract: A fluid sensor (100) for detecting a target fluid (TF; TF1, TF2) comprises a plurality of thermal radiation emitters (10-1, ..., 10-#) for emitting a broadband thermal radiation (R), a waveguide structure (20) configured to guide the emitted thermal radiation (R) emitted from the plurality of thermal radiation emitters (10-1, ..., 10-#), wherein the guided thermal radiation (R) comprises an evanescent field component for interacting with the surrounding atmosphere comprising the target fluid (TF), an optical filter structure (30) coupled to the waveguide structure (20), wherein the optical filter structure (30) is configured to filter the broadband thermal radiation (R) emitted by the thermal radiation emitters (10-1, ..., 10-#) and to provide a filtered thermal radiation (RF) having a center wavelength (λ0), a thermal radiation detector (40) configured to provide a detector output signal (SOUT) based on a radiation strength of the filtered thermal radiation (RF) received from the waveguide structure (20), and an actuation device (50) for connecting the plurality of thermal radiation emitters (10-1, ..., 10-#) with a power source (60) for providing the thermal radiation emitters (10-1, ..., 10-#) in an actuated condition with electric energy so that the plurality of thermal radiation emitters (10-1, ..., 10-#) has an operating temperature between 400 to 1300 K.
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公开(公告)号：EP3851848A1
公开(公告)日：2021-07-21
申请号：EP20152726.4
申请日：2020-01-20
Applicant: Infineon Technologies AG
Inventor： ONARAN, Abidin Guclu , TUMPOLD, David
Abstract: The present disclosure concerns a micromechanical device (100) and a method for manufacturing the same. The micromechanical device (100) may comprise a membrane structure (110) suspended on a substrate (102). The membrane structure (110) may comprise a perforated gas permeable membrane (120) comprising a plurality of perforations (130), and a reinforcement structure (140) being coupled with the perforated membrane (120) for stiffening the perforated membrane (120) and/or for increasing the mechanical stability of the perforated membrane (120) in order to attenuate an oscillation of the perforated membrane (120).
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公开(公告)号：EP4371931A1
公开(公告)日：2024-05-22
申请号：EP22208533.4
申请日：2022-11-21
Applicant: Infineon Technologies AG
Inventor： TUMPOLD, David , GHADERI, Mohammadamir
IPC: B81B3/00
CPC classification number: B81B3/0072 , B81B3/0078
Abstract: A MEMS device (100) comprising a suspended membrane structure (110) having an inner membrane section (112) and an outer membrane section (114) is presented. The outer membrane section (114) surrounds the inner membrane section (112), The membrane structure (110) comprises an elastically deformable spring structure (116) in the outer membrane section (114), wherein the spring structure (116) is arranged to convert a thermal-induced compressive stress in the suspended membrane structure (110) into a spring displacement.
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Patent Agency Ranking
公开(公告)号：EP4202414A1
公开(公告)日：2023-06-28
申请号：EP21217025.2
申请日：2021-12-22
Applicant: Infineon Technologies AG
Inventor： ALLMEIER, Andreas , DEBIE, Derek , ELIAN, Klaus , GEISSLER, Christian , GHAHREMANI, Cyrus , HEITZER, Ludwig , MEYER, Thorsten , POHL, Jens , TUMPOLD, David
IPC: G01N21/3504 , G01N21/17
Abstract: A radiation source device comprising at least one membrane layer, a radiation source structure configured to emit electromagnetic or infrared radiation, a substrate and a spacer structure, wherein the substrate and the at least one membrane form a chamber, wherein a pressure in the chamber is lower than or equal to a pressure outside of the chamber, wherein the radiation source structure is arranged between the at least one membrane layer and the substrate .
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公开(公告)号：EP3859308A1
公开(公告)日：2021-08-04
申请号：EP20154153.9
申请日：2020-01-28
Applicant: Infineon Technologies AG
Inventor： TUMPOLD, David , GLACER, Christoph , KUBACKI, Steffen
IPC: G01N21/17 , G01N21/3504 , H01L33/60
Abstract: A radiation source (10) for obliquely launching a narrowband electromagnetic radiation (11) into a cavity (12), comprises an emitter structure (14) having a main radiation emission region (14-1) for emitting the narrowband electromagnetic radiation (11), wherein the emitter structure (14) is optically coupled to the cavity (12), and a layer element (18) coupled to the main radiation emission region (14-1) of the emitter structure (14), wherein the layer element (18) comprises a radiation deflection (distortion) structure (20) configured for deflecting the radiation emission characteristic of the emitter structure (14) with respect to the surface normal of the main radiation emission region (14-1) of the emitter structure (14).
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公开(公告)号：EP3715842A1
公开(公告)日：2020-09-30
申请号：EP19165331.0
申请日：2019-03-26
Applicant: Infineon Technologies AG
Inventor： TUMPOLD, David
Abstract: The present disclosure concerns a MEMS gas sensor (10) comprising, inter alia, a photoa-coustic sensor (10) comprising a thermal emitter (16) and an acoustic transducer (17), the thermal emitter (16) and the acoustic transducer (17) being arranged inside a mutual measurement cavity (18). The thermal emitter (16) comprises a semiconductor substrate (11) and a heating structure (12) supported by the semiconductor substrate (11). The heating structure (12) includes a heating element (13). The MEMS gas sensor (10) further comprises a chemical sensor (14) thermally coupled to the heating element (13), and the chemical sensor (14) including a gas adsorbing layer (15).
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9.发明公开
公开(公告)号：EP3715826A1
公开(公告)日：2020-09-30
申请号：EP19165334.4
申请日：2019-03-26
Applicant: Infineon Technologies AG
Inventor： DORFMEISTER, Manuel , KRUMBEIN, Ulrich , SCHMID, Ulrich , SCHNEIDER, Michael , DEHE, Alfons , GLACER, Christoph , TUMPOLD, David
Abstract: A Sensor element 100 comprises a membrane structure 110 suspended on a frame structure 115, wherein the membrane structure 110 comprises a membrane element 120 and an actuator 125. The membrane structure 110 is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator 125 is configured to deflect the membrane structure 110 in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure 110 in a second actuation state in a resonance mode having an associated resonance frequency.
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10.发明公开
公开(公告)号：EP4109927A1
公开(公告)日：2022-12-28
申请号：EP21187639.6
申请日：2021-07-26
Applicant: Infineon Technologies AG
Inventor： BRETTHAUER, Christian , GOSWAMI, Somu , HERRMANN, Matthias Friedrich , LORENZ, Gunar , MISHRA, Pradyumna , NEUMAIER, Daniel , TUMPOLD, David
Abstract: A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.
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