公开(公告)号：EP3676597B1

公开(公告)日：2024-07-24

申请号：EP18792535.9

申请日：2018-10-09

IPC: G01N21/3504 ,  G01N21/17 ,  G01N21/35 ,  G01M3/38

CPC classification number: G01N21/3504 ,  G01M3/38 ,  G01N2021/176520130101 ,  G01N2021/177220130101 ,  G01N2021/179520130101 ,  G01N2021/351320130101 ,  G01N2201/022120130101 ,  G01N2201/023120130101 ,  G01N2201/061220130101 ,  G01N2201/061620130101 ,  G01N2201/0618620130101 ,  G01N2201/069620130101 ,  G01N2201/068620130101 ,  G01M3/002

公开(公告)号：EP4407299A1

公开(公告)日：2024-07-31

申请号：EP23153376.1

申请日：2023-01-26

Applicant: Infineon Technologies AG

Inventor： GRILLE, Thomas ,  STOCKER, Gerald ,  OSTERMANN, Thomas ,  THAKKAR, Pooja ,  TUMPOLD, David ,  JANNESARI, Reyhaneh

IPC: G01N21/3504 ,  G01N21/3577 ,  G01N21/552 ,  G01N33/00

CPC classification number: G01N21/552 ,  G01N21/3504 ,  G01N21/3577 ,  G01N2201/068620130101 ,  G01N33/004

Abstract: A fluid sensor (100) for detecting a target fluid (TF; TF1, TF2) comprises a plurality of thermal radiation emitters (10-1, ..., 10-#) for emitting a broadband thermal radiation (R), a waveguide structure (20) configured to guide the emitted thermal radiation (R) emitted from the plurality of thermal radiation emitters (10-1, ..., 10-#), wherein the guided thermal radiation (R) comprises an evanescent field component for interacting with the surrounding atmosphere comprising the target fluid (TF), an optical filter structure (30) coupled to the waveguide structure (20), wherein the optical filter structure (30) is configured to filter the broadband thermal radiation (R) emitted by the thermal radiation emitters (10-1, ..., 10-#) and to provide a filtered thermal radiation (RF) having a center wavelength (λ0), a thermal radiation detector (40) configured to provide a detector output signal (SOUT) based on a radiation strength of the filtered thermal radiation (RF) received from the waveguide structure (20), and an actuation device (50) for connecting the plurality of thermal radiation emitters (10-1, ..., 10-#) with a power source (60) for providing the thermal radiation emitters (10-1, ..., 10-#) in an actuated condition with electric energy so that the plurality of thermal radiation emitters (10-1, ..., 10-#) has an operating temperature between 400 to 1300 K.