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公开(公告)号：US20190064060A1
公开(公告)日：2019-02-28
申请号：US16105448
申请日：2018-08-20
Applicant: Innovative Micro Technology
Inventor： Christopher S. GUDEMAN , Jaquelin K. SPONG
IPC: G01N21/25 , G01N21/3504 , G01N33/00
Abstract: Systems and methods for forming a compact gas sensor include a multilayer etalon as a wavelength discriminating element. The position of the etalon may be adjusted to tune its transmission profile. And embodiment directed to carbon dioxide detection is described.
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