公开(公告)号：WO2016025102A1

公开(公告)日：2016-02-18

申请号：PCT/US2015/039470

申请日：2015-07-08

Applicant: INNOVATIVE MICRO TECHNOLOGY

Inventor： ZEYEN, Benedikt ,  PATIL, Vikram

IPC: H01L21/00

CPC classification number: H01H59/0009 ,  B81C1/00333 ,  H01H49/00 ,  H03H9/1057

Abstract: A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming a sacrificial layer over a substrate, forming a flexible membrane over the sacrificial layer, forming a release hole through a flexible membrane to the sacrificial layer, introducing an etchant through the release hole to remove the sacrificial layer, and then sealing that release hole with a low temperature solder.

Abstract translation: 用于在微细结构中形成空腔的方法包括用低温焊料密封该空腔。 该方法可以包括在衬底上形成牺牲层，在牺牲层上形成柔性膜，通过柔性膜形成到牺牲层的释放孔，通过释放孔引入蚀刻剂以去除牺牲层，然后密封 该释放孔与低温焊料。

公开(公告)号：WO2015017067A1

公开(公告)日：2015-02-05

申请号：PCT/US2014/044804

申请日：2014-06-30

Applicant: INNOVATIVE MICRO TECHNOLOGY

Inventor： ZEYEN, Benedikt

IPC: C21D1/04 ,  G01R33/06

CPC classification number: G01R33/0052 ,  G01R33/0011 ,  Y10T29/4902

Abstract: A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.

Abstract translation: 微制造的磁场传感器使用与一个或多个可渗透的磁通引导件组合的磁敏结构。 磁通引导件可以将外部施加的磁场的偏轴分量穿过磁敏结构的敏感轴线，或者可以将磁敏结构屏蔽到离轴，杂散场或噪声源。 布置在单个基板上的磁通引导件和磁敏结构的组合可以使单个封装中的集成的3轴磁力计能够大大地提高成本和性能。

公开(公告)号：EP3027781A1

公开(公告)日：2016-06-08

申请号：EP14832320.7

申请日：2014-06-30

Applicant: Innovative Micro Technology

Inventor： ZEYEN, Benedikt

IPC: C21D1/04 ,  G01R33/06

CPC classification number: G01R33/0052 ,  G01R33/0011 ,  Y10T29/4902

Abstract: A microfabricated magnetic field transducer uses a magnetically sensitive structure in combination with one or more permeable magnetic flux guides. The flux guides may route off-axis components of an externally applied magnetic field across the sensitive axis of the magnetically sensitive structure, or may shield the magnetically sensitive structure from off-axis, stray fields or noise sources. A combination of flux guides and magnetically sensitive structures arranged on a single substrate may enable an integrated, 3-axis magnetometer in a single package, greatly improving cost and performance.

Abstract translation: 微制造的磁场传感器使用与一个或多个可渗透的磁通导向器组合的磁敏结构。 磁通引导件可以将外部施加的磁场的偏轴分量穿过磁敏结构的敏感轴线，或者可以将磁敏结构屏蔽到离轴，杂散场或噪声源。 布置在单个基板上的磁通引导件和磁敏结构的组合可以使单个封装中的集成的3轴磁力计可以大大提高成本和性能。