公开(公告)号：US20250052573A1

公开(公告)日：2025-02-13

申请号：US18535271

申请日：2023-12-11

Applicant: InvenSense, Inc.

Inventor： Federico Mazzarella ,  Giacomo Petracca ,  Luca Collamati ,  Andrea Di Ruzza ,  Carlo Pinna ,  Vadim Tsinker ,  Carlo Mattaliano

IPC: G01C19/5776

Abstract: A MEMS gyroscope includes a mixed analog and digital drive loop. A drive sense signal from a suspended spring-mass system is received by the drive loop, rectified, and compared to a reference signal. The result of the comparison is processed and converted into a digital signal that is processed by a digital filter and a digital pulse-width modulator of the drive loop. The output of the pulse width modulator controls a high-voltage drive of the drive loop that generates a drive signal having an amplitude based on the pulse width modulator output signal and supplies the drive signal to drive the suspended spring-mass system.