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公开(公告)号:US20250070735A1
公开(公告)日:2025-02-27
申请号:US18237533
申请日:2023-08-24
Applicant: InvenSense, Inc.
Inventor: Federico Mazzarella , Vadim Tsinker
Abstract: In a microelectromechanical system (MEMS) sensor, movement of a component such as a proof mass due to a force of interest is sensed capacitively. A capacitance-to-voltage (C2V) converter receives a capacitance signal from the sensor and outputs a signal that includes an offset in addition to a signal of interest. The output signal is analyzed to identify the offset portion of the output signal and to modify values one or more variable capacitors coupled to the C2V input reduce the offset portion of the output signal.
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公开(公告)号:US20220333957A1
公开(公告)日:2022-10-20
申请号:US17345778
申请日:2021-06-11
Applicant: INVENSENSE, INC.
Inventor: Federico Mazzarella , Massimiliano Musazzi
Abstract: The described technology is generally directed towards a sensor output digitizer. The sensor output digitizer can comprise a multiplexer stage, a multi-stage analog to digital converter, and a digital output combiner. The multiplexer stage can be configured to sequentially select sensor outputs from one or more sensors, resulting in a stream of selected sensor outputs. The multi-stage analog to digital converter can be coupled with the multiplexer stage, and can be configured to convert the stream of selected sensor outputs into a stream of digitized outputs. The digital output combiner can be configured to re-scale and sum intermediate outputs of the multi-stage analog to digital converter to produce a stream of digitized sensor outputs.
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公开(公告)号:US20230032538A1
公开(公告)日:2023-02-02
申请号:US17654325
申请日:2022-03-10
Applicant: INVENSENSE, INC.
Inventor: Carlo Pinna , Federico Mazzarella , Daniele Gardino , Cristiano Rocco Marra , Francesco Lazzarini
Abstract: The described technology is generally directed towards a sensor signal multiplexer and digitizer with analog notch filter and optimized sample frequency, and corresponding methods of use and manufacture. In some examples, the disclosed technologies can be used to reduce vibration sensitivity of an inertial measurement unit (IMU). The disclosed sensor signal multiplexer can sample sensor inputs on multiple input channels at a first, higher frequency, and integrate samples for each channel in order to generate lower frequency sensor outputs. The lower frequency sensor outputs can be converted to digital form.
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公开(公告)号:US11933648B2
公开(公告)日:2024-03-19
申请号:US17345778
申请日:2021-06-11
Applicant: INVENSENSE, INC.
Inventor: Federico Mazzarella , Massimiliano Musazzi
CPC classification number: G01D9/32 , B81B7/02 , B81B2201/02 , H03M1/145 , H03M1/16 , H03M1/462 , H03M1/466
Abstract: The described technology is generally directed towards a sensor output digitizer. The sensor output digitizer can comprise a multiplexer stage, a multi-stage analog to digital converter, and a digital output combiner. The multiplexer stage can be configured to sequentially select sensor outputs from one or more sensors, resulting in a stream of selected sensor outputs. The multi-stage analog to digital converter can be coupled with the multiplexer stage, and can be configured to convert the stream of selected sensor outputs into a stream of digitized outputs. The digital output combiner can be configured to re-scale and sum intermediate outputs of the multi-stage analog to digital converter to produce a stream of digitized sensor outputs.
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公开(公告)号:US20170168088A1
公开(公告)日:2017-06-15
申请号:US15370385
申请日:2016-12-06
Applicant: InvenSense, Inc.
Inventor: Luca Coronato , Giacomo Gafforelli , Adolfo Giambastiani , Federico Mazzarella , Massimiliano Musazzi , Michele Folz
IPC: G01P21/00 , G01P15/125
CPC classification number: G01P21/00 , G01P15/125
Abstract: An accelerometer has a plurality of proof masses and a plurality of sense electrodes, which collectively form at least two capacitors. A first sense drive signal is applied to a first capacitor and a second sense drive signal is applied to a second capacitor. Both of the sense drive signals have the same sense drive frequency. Capacitance signals are sensed from each of the first capacitor and second capacitor, and a common mode component of the capacitance signals is determined. A capacitor error is identified based on the common mode component.
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公开(公告)号:US12270652B2
公开(公告)日:2025-04-08
申请号:US17986598
申请日:2022-11-14
Applicant: InvenSense, Inc.
Inventor: Vito Avantaggiati , Carlo Pinna , Federico Mazzarella
IPC: G01C19/5649 , G01C19/5656 , G01C19/5776 , G01C25/00
Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.
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公开(公告)号:US20240186971A1
公开(公告)日:2024-06-06
申请号:US18070081
申请日:2022-11-28
Applicant: InvenSense, Inc.
Inventor: Luca Collamati , Federico Mazzarella
IPC: H03F3/70 , G01D5/24 , G01P15/125 , G01P15/14
CPC classification number: H03F3/70 , G01D5/24 , G01P15/125 , G01P15/14
Abstract: A capacitive sensing charge amplifier, e.g., in a direct current (DC) feedback network, may incorporate a switching capacitor, including a first control switch and a second control switch, which receives a switching signal to charge and discharges the switching signal to a virtual ground of a sense amplifier. Noise incorporated into the output of the sense amplifier (e.g., a MEMS output signal) is filtered by a demodulation signal at a demodulator such that the period average noise at the demodulator output equals zero. The time varying nature of the switching capacitor resistance generally reshapes the system's post-demodulation noise to reduce its low frequency output noise.
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公开(公告)号:US20250052573A1
公开(公告)日:2025-02-13
申请号:US18535271
申请日:2023-12-11
Applicant: InvenSense, Inc.
Inventor: Federico Mazzarella , Giacomo Petracca , Luca Collamati , Andrea Di Ruzza , Carlo Pinna , Vadim Tsinker , Carlo Mattaliano
IPC: G01C19/5776
Abstract: A MEMS gyroscope includes a mixed analog and digital drive loop. A drive sense signal from a suspended spring-mass system is received by the drive loop, rectified, and compared to a reference signal. The result of the comparison is processed and converted into a digital signal that is processed by a digital filter and a digital pulse-width modulator of the drive loop. The output of the pulse width modulator controls a high-voltage drive of the drive loop that generates a drive signal having an amplitude based on the pulse width modulator output signal and supplies the drive signal to drive the suspended spring-mass system.
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公开(公告)号:US20230160696A1
公开(公告)日:2023-05-25
申请号:US17986598
申请日:2022-11-14
Applicant: InvenSense, Inc.
Inventor: Vito Avantaggiati , Carlo Pinna , Federico Mazzarella
IPC: G01C19/5649 , G01C19/5656 , G01C25/00
CPC classification number: G01C19/5649 , G01C19/5656 , G01C25/00
Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.
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公开(公告)号:US10725068B2
公开(公告)日:2020-07-28
申请号:US15363522
申请日:2016-11-29
Applicant: InvenSense, Inc.
Inventor: Giacomo Gafforelli , Luca Coronato , Adolfo Giambastiani , Federico Mazzarella , Massimiliano Musazzi , Michele Folz
IPC: G01P21/00 , G01P15/125
Abstract: A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have different frequencies. An error is identified based on a portion of a signal that is received from the accelerometer and that is responsive to the auxiliary drive signal. Compensation is performed at the accelerometer based on the identified error.
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