DYNAMIC CAPACITANCE-TO-VOLVAGE OFFSET CANCELLATION

    公开(公告)号:US20250070735A1

    公开(公告)日:2025-02-27

    申请号:US18237533

    申请日:2023-08-24

    Abstract: In a microelectromechanical system (MEMS) sensor, movement of a component such as a proof mass due to a force of interest is sensed capacitively. A capacitance-to-voltage (C2V) converter receives a capacitance signal from the sensor and outputs a signal that includes an offset in addition to a signal of interest. The output signal is analyzed to identify the offset portion of the output signal and to modify values one or more variable capacitors coupled to the C2V input reduce the offset portion of the output signal.

    SENSOR OUTPUT DIGITIZER
    2.
    发明申请

    公开(公告)号:US20220333957A1

    公开(公告)日:2022-10-20

    申请号:US17345778

    申请日:2021-06-11

    Abstract: The described technology is generally directed towards a sensor output digitizer. The sensor output digitizer can comprise a multiplexer stage, a multi-stage analog to digital converter, and a digital output combiner. The multiplexer stage can be configured to sequentially select sensor outputs from one or more sensors, resulting in a stream of selected sensor outputs. The multi-stage analog to digital converter can be coupled with the multiplexer stage, and can be configured to convert the stream of selected sensor outputs into a stream of digitized outputs. The digital output combiner can be configured to re-scale and sum intermediate outputs of the multi-stage analog to digital converter to produce a stream of digitized sensor outputs.

    Sensor output digitizer
    4.
    发明授权

    公开(公告)号:US11933648B2

    公开(公告)日:2024-03-19

    申请号:US17345778

    申请日:2021-06-11

    Abstract: The described technology is generally directed towards a sensor output digitizer. The sensor output digitizer can comprise a multiplexer stage, a multi-stage analog to digital converter, and a digital output combiner. The multiplexer stage can be configured to sequentially select sensor outputs from one or more sensors, resulting in a stream of selected sensor outputs. The multi-stage analog to digital converter can be coupled with the multiplexer stage, and can be configured to convert the stream of selected sensor outputs into a stream of digitized outputs. The digital output combiner can be configured to re-scale and sum intermediate outputs of the multi-stage analog to digital converter to produce a stream of digitized sensor outputs.

    4-points phase and sensitivity estimation algorithm and related architecture

    公开(公告)号:US12270652B2

    公开(公告)日:2025-04-08

    申请号:US17986598

    申请日:2022-11-14

    Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.

    DC RESTORE SCHEME FOR CAPACITIVE SENSING AMPLIFIERS WITH OPTIMAL NOISE FILTERING

    公开(公告)号:US20240186971A1

    公开(公告)日:2024-06-06

    申请号:US18070081

    申请日:2022-11-28

    CPC classification number: H03F3/70 G01D5/24 G01P15/125 G01P15/14

    Abstract: A capacitive sensing charge amplifier, e.g., in a direct current (DC) feedback network, may incorporate a switching capacitor, including a first control switch and a second control switch, which receives a switching signal to charge and discharges the switching signal to a virtual ground of a sense amplifier. Noise incorporated into the output of the sense amplifier (e.g., a MEMS output signal) is filtered by a demodulation signal at a demodulator such that the period average noise at the demodulator output equals zero. The time varying nature of the switching capacitor resistance generally reshapes the system's post-demodulation noise to reduce its low frequency output noise.

    4-POINTS PHASE AND SENSITIVITY ESTIMATION ALGORITHM AND RELATED ARCHITECTURE

    公开(公告)号:US20230160696A1

    公开(公告)日:2023-05-25

    申请号:US17986598

    申请日:2022-11-14

    CPC classification number: G01C19/5649 G01C19/5656 G01C25/00

    Abstract: An algorithm and architecture for sense transfer function estimation injects one or more test signals from a signal generator into a MEMS gyroscope to detect an output signal (e.g., proof mass output sense signal), including an in-phase (e.g., Coriolis) component and a quadrature component. The in-phase and quadrature components are encoded with reference signals to determine phase and/or gain variation and are processed via a variety of components (e.g., matrix rotation, digital gain, tones demodulator, transfer function errors estimation, etc.) to estimate a sense transfer function of the MEMS (e.g., Hs(fd)) and corresponding phase and/or gain offset of Hs(fd). The in-phase and quadrature components are also compensated for phase and/or gain offset by system components.

    Identification and compensation of MEMS accelerometer errors

    公开(公告)号:US10725068B2

    公开(公告)日:2020-07-28

    申请号:US15363522

    申请日:2016-11-29

    Abstract: A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have different frequencies. An error is identified based on a portion of a signal that is received from the accelerometer and that is responsive to the auxiliary drive signal. Compensation is performed at the accelerometer based on the identified error.

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