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1.发明授权SYSTEM AND METHOD FOR CONTROLLING INTENSITY OF A BEAM OF ELECTROMAGNETIC RADIATION IN ELLIPSOMETERS AND POLARIMETERS 有权用于控制椭圆偏振仪和偏振器中的电磁辐射束的强度的系统和方法
公开(公告)号：EP2109758B1
公开(公告)日：2017-06-21
申请号：EP08726833.0
申请日：2008-03-14
Applicant: J.A. WOOLLAM CO. INC.
Inventor： PFEIFFER. Galen L. , LIPHARDT, Martin M.
CPC classification number: G01J3/10 , G01J3/447 , G01J4/00 , G01N21/211 , G01N2021/213
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2.发明公开SYSTEM AND METHOD FOR CONTROLLING INTENSITY OF A BEAM OF ELECTROMAGNETIC RADIATION IN ELLIPSOMETERS AN POLARIMETERS 有权系统及其控制方法电磁辐射的射线的强度和椭偏仪偏光计
公开(公告)号：EP2109758A1
公开(公告)日：2009-10-21
申请号：EP08726833.0
申请日：2008-03-14
Applicant: J.A. WOOLLAM CO. INC.
Inventor： PFEIFFER. Galen L. , LIPHARDT, Martin M.
IPC: G01J4/00
CPC classification number: G01J3/10 , G01J3/447 , G01J4/00 , G01N21/211 , G01N2021/213
Abstract: An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
Abstract translation: 椭偏仪或旋光仪系统和方法，用于通过与在中间和控制补偿器（C）施加控制（P2）和梁（P）偏振器，任选地组合一种控制电磁束的强度随波长的光谱。
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