RESIN FOR NANOIMPRINTING, LAMINATE CONTAINING RESIN FOR NANOIMPRINTING, PRINTED BOARD CONTAINING RESIN FOR NANOIMPRINTING, AND METHOD FOR PRODUCING NANOIMPRINT SUBSTRATE
    3.
    发明申请
    RESIN FOR NANOIMPRINTING, LAMINATE CONTAINING RESIN FOR NANOIMPRINTING, PRINTED BOARD CONTAINING RESIN FOR NANOIMPRINTING, AND METHOD FOR PRODUCING NANOIMPRINT SUBSTRATE 审中-公开
    用于纳米压印的树脂,用于纳米压印的包含树脂的层压板,用于纳米压印的印刷板,以及用于生产纳米印刷基板的方法

    公开(公告)号:US20150298387A1

    公开(公告)日:2015-10-22

    申请号:US14649735

    申请日:2013-11-13

    Abstract: Provided is a resin for nanoimprinting, which is capable of preventing removal of a transfer-receiving resin from a substrate when a mold is separated during nanoimprinting, and which is also capable of transferring a pattern on a mold to a transfer-receiving resin with high accuracy during thermal nanoimprinting, while improving the throughput. A resin for nanoimprinting, which is represented by formula (1). (In the formula, each of R1-R5 independently represents —H or —OH, and at least one of the R1-R5 moieties represents —OH; R6 represents a linear, branched or cyclic alkyl group having 1-20 carbon atoms, an aryl group having 6-20 carbon atoms or an aralkyl group having 7-20 carbon atoms; X represents an amide or an ester; Y may be absent, or represents an amide or an ester; P represents an integer of 1-10; and each of m and n represents an integer of 1 or more.)

    Abstract translation: 本发明提供一种纳米压印用树脂,其能够在纳米压印时将模具分离时从基板上除去转印接收树脂,并且还能够将模具上的图案转印到高转印接收树脂上 在热纳米压印过程中的精度,同时提高了生产量。 用于纳米压印的树脂,其由式(1)表示。 (式中,R 1 -R 5各自独立地表示-H或-OH,R 1〜R 5部分中的至少一个表示-OH; R 6表示具有1-20个碳原子的直链,支链或环状烷基, 具有6-20个碳原子的芳基或具有7-20个碳原子的芳烷基; X表示酰胺或酯; Y可以不存在,或表示酰胺或酯; P表示1-10的整数;以及 m和n各自表示1以上的整数。)

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