Abstract:
PROBLEM TO BE SOLVED: To provide a calixarene-based compound useful as a raw material of a substrate component contained in a radiation-sensitive composition which can form a chemistry amplification type positive resist film which can form a stabilized and highly precise fine pattern.SOLUTION: The calixarene-based compound is shown by General formula (A1) or General formula (A2). In General formulas (A1) and (A2), each R denotes a hydrogen atom or a group shown by General formula (R), and each X denotes an alkylene group. Moreover, in the General formula (R), Rdenotes a 1-20C hydrocarbon group, and * denotes a bonding position of the group shown by the General formula (R).
Abstract:
PROBLEM TO BE SOLVED: To provide a phenolic compound useful as a starting material of a base component contained in a radiation-sensitive composition forming a chemically amplified positive resist film which is effectively sensitive to EB (electron beam) or the like. SOLUTION: The phenolic compound is obtained by bringing a compound represented by formula (1) and a compound represented by general formula (2) into a condensation reaction. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a hyper branched polycarbonate having a novel molecular structure and provide its manufacturing method. SOLUTION: The hyper branched polycarbonate is composed of a repeating unit represented by general formula (1). Its manufacturing method consists of obtaining the hyper branched polycarbonate via the process of reacting bisphenol A bischloroformate and 1,1,1-tris(4-hydroxyphenyl)ethane in the presence of a base and tetrahydrofuran. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a calixarene-based derivative of new structure usable as a photoresist compatible with next generation photolithography, and to provide a composition containing the same. SOLUTION: The calixarene-based derivative having a substituent of formula(2) ( wherein, A is a 1-11C substituted or nonsubstituted bivalent hydrocarbon group; B is a monovalent acid-dissociable group; and n is 0 or 1 ) is provided. The composition containing the same is also provided. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a new styrenic polymer with a group derived from anthracene in the side chain, and its manufacturing method and to provide a refractive index converting material comprised of the polymer and a light-heat energy converting-accumulating material made of the polymer. SOLUTION: The styrenic polymer is composed of a repeated unit represented by formula (1) [in the formula R 1 shows a group represented by any one of formulae (a) to (d) and n is a repeating number]. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a new sulfur atom-containing cyclic compound containing sulfur atoms at a high density and resultantly useful as an optical material and to provide a method for producing the compound. SOLUTION: The sulfur atom-containing cyclic compound is characterized in that the compound is represented by general formula (1) [wherein, R 1 is a group represented by a -CH 2 -O-R 2 (wherein, R 2 represents a 1-6C alkyl group or a substituted or an unsubstituted phenyl group); m is an integer of ≥1; and n is an integer of ≥2]. The method for producing the sulfur atom-containing cyclic compound represented by general formula (1) is characterized as reacting a sulfur-containing cyclic compound with a thiirane compound and thereby obtaining the sulfur atom-containing cyclic compound. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To obtain a new substance which can be used as an acid-dissociating group-containing polymer having high transparency for radiations such as F2 excimer laser and satisfying basic performances required for resists, and to obtain a radiation-sensitive resin composition using the same. SOLUTION: The subject polyrotaxane comprises a fluorine-containing cyclodextrin represented by formula (1) and a linear polymer which passes through the cavity of this cyclic compound. The radiation-sensitive resin composition comprises the fluorine-containing cyclodextrin or the polyrotaxane as the acid-dissociating group-containing polymer, and a radiation-sensitive acid-producing agent. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide an acid-dissociable group-containing polymer that has high transparency to a radiation and fulfills the basic performance required of a resist and to provide a radiation-sensitive resin composition. SOLUTION: The acid-dissociable group-containing polymer has a repeating unit represented by formula (1) wherein R is at least one kind of divalent organic group of formula selected from the group consisting of formula (1-1), formula (1-2), formula (1-3), formula (1-4) and formula (1-5). The radiation-sensitive resin composition comprises the polymer and a radiation-sensitive acid generator. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To obtain a new polyimide containing an epoxy group, and further to provide a method for producing the polyimide, and to obtain a curable resin composition. SOLUTION: The polyimide has a repeating unit represented by formula 1 (wherein, X is a single bond or a divalent group; R1 and R2 are each a group having a glycidyl structure; and Y is a tetravalent organic group). The method for producing the polyimide comprises reacting a diamine compound represented by formula 2 (wherein, X is a single bond or a divalent group) with a tetracarboxylic dianhydride in the presence of a basic compound, imidating the resultant reaction product to provide a carboxy group-containing polyimide, and reacting the carboxy group-containing polyimide with a glycidyl compound. The curable resin composition contains this polyimide.
Abstract:
PROBLEM TO BE SOLVED: To obtain a novel polyimide and a preparation process thereof. SOLUTION: A polyimide comprises a repeating structural unit of the formula [wherein X is a group of -(CYY')p- (wherein Y and Y' are identical to or different from each other and are each a hydrogen atom, an aryl group, an alkyl group or a halogenated alkyl group) or a fluorenylene group; R is a tetravalent organic group; and p is 0 or 1] and has a number average molecular weight calculated as polystyrene, measured by gel permeation chromatography method, of from 5,000 to 100,000. This polyimide contains many carboxyl groups in the side chain and is converted into various photosensitive polyimides by chemically modifying the carboxyl groups.