公开(公告)号：DE602004009057D1

公开(公告)日：2007-10-31

申请号：DE602004009057

申请日：2004-05-12

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: G01R1/073 ,  G01R3/00

Abstract: Disclosed herein are a sheet-like probe capable of surly preventing positional deviation between electrode structures and electrodes to be inspected by temperature changes in a burn-in test, even when the object of inspection is a wafer having a large area of 8 inches or greater in diameter or a circuit device, the pitch of electrodes to be inspected of which is extremely small, and thus capable of stably retaining a good electrically connected state, and a production process and applications thereof. The sheet-like probe of the present invention comprises a contact film obtained by holding a plurality of electrode structures arranged in accordance with a pattern corresponding to respective electrodes to be connected and having a front-surface electrode part exposed to a front surface and a back-surface electrode part exposed to a back surface by an insulating film composed of a flexible resin, and a frame plate supporting the contact film.

公开(公告)号：EP1615297A4

公开(公告)日：2007-11-28

申请号：EP04725789

申请日：2004-04-05

Applicant: JSR CORP

Inventor： SATO KATSUMI ,  INOUE KAZUO

IPC: H01R11/01 ,  G01R1/073 ,  H01L21/66 ,  H01L23/498 ,  H01R13/24

CPC classification number: H01R13/2414 ,  G01R1/0735 ,  H01L23/49827 ,  H01L23/49838 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An anisotropic conductive connector that enables a predetermined electrical inspection on a circuit device whose clock frequency is, for example, more than 1 GHz, and a circuit-device electrical-inspection device having the anisotropic conductive connector are provided. The anisotropic conductive connector is equipped with an elastic anisotropic-conductive film. The film includes a plurality of connecting conductive parts disposed in accordance with the pattern corresponding to an electrode to be connected to the pattern and extending toward the direction of the thickness, and insulating parts for insulating the connecting conductive parts from each other. The anisotropic conductive connector is characterized in that within the elastic, anisotropic-conductive film, a conductive part for high-frequency shielding extends toward the direction of thickness. The circuit-device electrical-inspection device is characterized by comprising such an anisotropic conductive connector.

公开(公告)号：EP1548884A4

公开(公告)日：2007-05-09

申请号：EP03791285

申请日：2003-08-26

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: H01L23/498 ,  H01L23/60 ,  H01R11/01 ,  G01R1/06 ,  H01L21/66

CPC classification number: H01L23/49827 ,  H01L23/60 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

Abstract: An anisotropic conductive sheet not contaminating an object to be connected, not adhering to the object even if the sheet pressed by the object is left for a long time in a high-temperature environment, and preventing the sheet from being charged or suppressing the charging, and eliminating adverse influence of static electricity, its manufacturing method, and its application are disclosed. The anisotropic conductive sheet (10) comprises an anisotropic conductive sheet body (11) made of an elastic polymer material, having conductive portions (12) extending in the direction of thickness and insulating portions (13) insulating the conductive portions (12) from one another and a DLC film (15) provided on one or both sides of the anisotropic conductive sheet body (11) and so integrally formed as to cover at least the insulating portions.

公开(公告)号：EP1732120A4

公开(公告)日：2012-02-29

申请号：EP05727781

申请日：2005-03-30

Applicant: JSR CORP

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: H01L21/66 ,  G01R1/06 ,  G01R1/073 ,  G01R31/28

CPC classification number: G01R1/07364 ,  G01R1/07314 ,  G01R1/07371 ,  G01R1/07378

公开(公告)号：AT464569T

公开(公告)日：2010-04-15

申请号：AT03758872

申请日：2003-10-24

Applicant: JSR CORP

Inventor： SATO KATSUMI ,  INOUE KAZUO

IPC: G01R1/073 ,  G01R31/02 ,  G01R1/06 ,  G01R1/067 ,  G01R31/28 ,  H01B5/16 ,  H01L21/66 ,  H01L23/498 ,  H01R11/01 ,  H01R33/76 ,  H05K1/11 ,  H05K3/40 ,  H05K3/42

Abstract: Disclosed herein are a sheet-like connector that electrode structures each having a front-surface electrode part small in diameter can be formed, a stable electrically connected state can be surely achieved even to a circuit device, on which electrodes have been formed at a small pitch, and the electrode structures are prevented from falling off from an insulating sheet to achieve high durability, and a production process and applications thereof. The sheet-like connector of the invention has an insulating sheet and a plurality of electrode structures arranged in the insulating sheet and extending through in a thickness-wise direction of the insulating sheet. Each of the electrode structures is composed of a front-surface electrode part exposed to a front surfaces of the insulating sheet and projected from the front surface of the insulating sheet, a back-surface electrode part exposed to a back surface of the insulating sheet, a short circuit part continuously extending from the base end of the front-surface electrode part through the insulating sheet in the thickness-wise direction thereof and linked to the back-surface electrode part, and a holding part continuously extending from a base end portion of the front-surface electrode part outward along the front surface of the insulating sheet.

公开(公告)号：AT373831T

公开(公告)日：2007-10-15

申请号：AT04732418

申请日：2004-05-12

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: G01R1/073 ,  G01R3/00

Abstract: Disclosed herein are a sheet-like probe capable of surly preventing positional deviation between electrode structures and electrodes to be inspected by temperature changes in a burn-in test, even when the object of inspection is a wafer having a large area of 8 inches or greater in diameter or a circuit device, the pitch of electrodes to be inspected of which is extremely small, and thus capable of stably retaining a good electrically connected state, and a production process and applications thereof. The sheet-like probe of the present invention comprises a contact film obtained by holding a plurality of electrode structures arranged in accordance with a pattern corresponding to respective electrodes to be connected and having a front-surface electrode part exposed to a front surface and a back-surface electrode part exposed to a back surface by an insulating film composed of a flexible resin, and a frame plate supporting the contact film.

公开(公告)号：DE602004009057T2

公开(公告)日：2008-07-03

申请号：DE602004009057

申请日：2004-05-12

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: G01R1/073 ,  G01R3/00

Abstract: Disclosed herein are a sheet-like probe capable of surly preventing positional deviation between electrode structures and electrodes to be inspected by temperature changes in a burn-in test, even when the object of inspection is a wafer having a large area of 8 inches or greater in diameter or a circuit device, the pitch of electrodes to be inspected of which is extremely small, and thus capable of stably retaining a good electrically connected state, and a production process and applications thereof. The sheet-like probe of the present invention comprises a contact film obtained by holding a plurality of electrode structures arranged in accordance with a pattern corresponding to respective electrodes to be connected and having a front-surface electrode part exposed to a front surface and a back-surface electrode part exposed to a back surface by an insulating film composed of a flexible resin, and a frame plate supporting the contact film.

公开(公告)号：AT367650T

公开(公告)日：2007-08-15

申请号：AT03784570

申请日：2003-08-07

Applicant: JSR CORP

Inventor： SETAKA RYOJI ,  NAOI MASAYA ,  SATO KATSUMI

IPC: H01L21/66 ,  G01R1/067 ,  G01R1/073 ,  G01R3/00 ,  G01R15/18 ,  G01R31/28 ,  H01L23/498 ,  H01R13/24

Abstract: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y x 1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y x 6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 OMEGA is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 OMEGA is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 OMEGA is at most 1% of the total number of the conductive parts of connection.

公开(公告)号：AU2003275649A1

公开(公告)日：2004-05-13

申请号：AU2003275649

申请日：2003-10-24

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: G01R31/02 ,  G01R1/06 ,  G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  H01B5/16 ,  H01L21/66 ,  H01L23/498 ,  H01R11/01 ,  H01R33/76 ,  H05K1/11 ,  H05K3/40 ,  H05K3/42

Abstract: Disclosed herein are a sheet-like connector that electrode structures each having a front-surface electrode part small in diameter can be formed, a stable electrically connected state can be surely achieved even to a circuit device, on which electrodes have been formed at a small pitch, and the electrode structures are prevented from falling off from an insulating sheet to achieve high durability, and a production process and applications thereof. The sheet-like connector of the invention has an insulating sheet and a plurality of electrode structures arranged in the insulating sheet and extending through in a thickness-wise direction of the insulating sheet. Each of the electrode structures is composed of a front-surface electrode part exposed to a front surfaces of the insulating sheet and projected from the front surface of the insulating sheet, a back-surface electrode part exposed to a back surface of the insulating sheet, a short circuit part continuously extending from the base end of the front-surface electrode part through the insulating sheet in the thickness-wise direction thereof and linked to the back-surface electrode part, and a holding part continuously extending from a base end portion of the front-surface electrode part outward along the front surface of the insulating sheet.

公开(公告)号：AU2003254855A1

公开(公告)日：2004-02-25

申请号：AU2003254855

申请日：2003-08-07

Applicant: JSR CORP

Inventor： SATO KATSUMI ,  SETAKA RYOJI ,  NAOI MASAYA

IPC: G01R1/067 ,  G01R1/073 ,  G01R3/00 ,  G01R15/18 ,  G01R31/28 ,  H01L23/498 ,  H01R13/24 ,  H01L21/66

Abstract: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y x 1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y x 6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 OMEGA is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 OMEGA is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 OMEGA is at most 1% of the total number of the conductive parts of connection.