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公开(公告)号:DE60315059D1
公开(公告)日:2007-08-30
申请号:DE60315059
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI , NAOI MASAYA , SATO KATSUMI
Abstract: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y x 1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y x 6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 OMEGA is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 OMEGA is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 OMEGA is at most 1% of the total number of the conductive parts of connection.
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公开(公告)号:AT363729T
公开(公告)日:2007-06-15
申请号:AT03784569
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI , KOKUBO TERUKAZU , SENO KOJI , HARA TAKEO
Abstract: Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer can be conducted with ease even when the wafer has a large area of 8 inches or greater in diameter, and the pitch of electrodes to be inspected is small, and good conductivity is retained even upon repeated use, and applications thereof. The anisotropically conductive connector has a frame plate, in which a plurality of anisotropically conductive film-arranging holes have been formed correspondingly to electrode regions in all or part of integrated circuits on a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes. The elastic anisotropically conductive films each have a plurality of conductive parts for connection extending in a thickness-wise direction thereof and containing conductive particles, and an insulating part mutually insulating them. The conductive particles are obtained by coating core particles exhibiting magnetism with a high-conductive metal, a proportion of the high-conductive metal to the core particles is at least 15 % by mass, and the following t is at least 50 nm: t = Ä1/(Sw. rho )Ü x ÄN/(1 - N)Ü, wherein Sw is a BET specific surface area (m /kg) of the core particles, rho is a specific gravity (kg/m ) of the high-conductive metal, and N is (mass of the high-conductive metal/total mass of the conductive particles).
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公开(公告)号:AU2003254853A1
公开(公告)日:2004-02-25
申请号:AU2003254853
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI
IPC: C09C1/62 , C09C3/06 , C09D5/24 , C09D183/04 , G01R1/06 , G01R1/073 , H01B1/00 , H01B1/22 , H01B5/16 , H01L21/66 , H01L23/498 , H01R11/01
Abstract: Disclosed herein are an anisotropically conductive connector that conductivity of all conductive parts for connection is good, and insulating property between adjacent conductive parts for connection is surely achieved even when the pitch of electrodes as objects of connection is small, and good conductivity is retained over a long period of time even when it is used repeatedly under a high-temperature environment, and applications thereof. The above anisotropically conductive connector is a connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film have been formed, wherein supposing that the shortest width of each of the conductive parts for connection is W, and the number average particle diameter of the conductive particles is Dn, a value of a ratio W/Dn of the shortest width of the conductive part for connection to the number average particle diameter of the conductive particles falls within a range of 3 to 8, and a coefficient of variation of particle diameter of the conductive particles is at most 50%.
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公开(公告)号:AT367650T
公开(公告)日:2007-08-15
申请号:AT03784570
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI , NAOI MASAYA , SATO KATSUMI
Abstract: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y x 1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y x 6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 OMEGA is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 OMEGA is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 OMEGA is at most 1% of the total number of the conductive parts of connection.
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公开(公告)号:AU2003254855A1
公开(公告)日:2004-02-25
申请号:AU2003254855
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SATO KATSUMI , SETAKA RYOJI , NAOI MASAYA
Abstract: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y x 1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y x 6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 OMEGA is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 OMEGA is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 OMEGA is at most 1% of the total number of the conductive parts of connection.
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公开(公告)号:AU7869501A
公开(公告)日:2002-02-18
申请号:AU7869501
申请日:2001-08-08
Applicant: JSR CORP
Inventor: IGARASHI HISAO , INOUE KAZUO , SETAKA RYOJI
Abstract: Disclosed herein is an anisotropically conductive sheet capable of holding charge in its surfaces under an unpressurised state, and moving the charge held in the surface in a thickness-wise direction thereof in a state pressurised in the thickness-wise direction, thereby controlling the quantity of the charge at the surface. This anisotropically conductive sheet comprises a sheet base composed of an elastomer and conductive particles exhibiting magnetism contained in the sheet base in a state oriented so as to arrange in rows in a thickness-wise direction of the sheet base, and dispersed in a plane direction thereof. Supposing that a volume resistivity in the thickness-wise direction under an unpressurised state is R0, and a volume resistivity in the thickness-wise direction in a state pressurised under a pressure of 1 g/mm in the thickness-wise direction is R1, the volume resistivity R1 is 1 x 10 to 1 x 10 OMEGA .m, and a ratio (R0/R1) of the volume resistivity R0 to the volume resistivity R1 is 1 x 10 to 1 x 10 .
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公开(公告)号:DE60315059T2
公开(公告)日:2008-04-17
申请号:DE60315059
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI , NAOI MASAYA , SATO KATSUMI
Abstract: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y x 1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y x 6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 OMEGA is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 OMEGA is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 OMEGA is at most 1% of the total number of the conductive parts of connection.
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公开(公告)号:DE60314164T2
公开(公告)日:2008-02-07
申请号:DE60314164
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI , KOKUBO TERUKAZU , SENO KOJI , HARA TAKEO
Abstract: Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer can be conducted with ease even when the wafer has a large area of 8 inches or greater in diameter, and the pitch of electrodes to be inspected is small, and good conductivity is retained even upon repeated use, and applications thereof. The anisotropically conductive connector has a frame plate, in which a plurality of anisotropically conductive film-arranging holes have been formed correspondingly to electrode regions in all or part of integrated circuits on a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes. The elastic anisotropically conductive films each have a plurality of conductive parts for connection extending in a thickness-wise direction thereof and containing conductive particles, and an insulating part mutually insulating them. The conductive particles are obtained by coating core particles exhibiting magnetism with a high-conductive metal, a proportion of the high-conductive metal to the core particles is at least 15 % by mass, and the following t is at least 50 nm: t = Ä1/(Sw. rho )Ü x ÄN/(1 - N)Ü, wherein Sw is a BET specific surface area (m /kg) of the core particles, rho is a specific gravity (kg/m ) of the high-conductive metal, and N is (mass of the high-conductive metal/total mass of the conductive particles).
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公开(公告)号:DE60314164D1
公开(公告)日:2007-07-12
申请号:DE60314164
申请日:2003-08-07
Applicant: JSR CORP
Inventor: SETAKA RYOJI , KOKUBO TERUKAZU , SENO KOJI , HARA TAKEO
Abstract: Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer can be conducted with ease even when the wafer has a large area of 8 inches or greater in diameter, and the pitch of electrodes to be inspected is small, and good conductivity is retained even upon repeated use, and applications thereof. The anisotropically conductive connector has a frame plate, in which a plurality of anisotropically conductive film-arranging holes have been formed correspondingly to electrode regions in all or part of integrated circuits on a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes. The elastic anisotropically conductive films each have a plurality of conductive parts for connection extending in a thickness-wise direction thereof and containing conductive particles, and an insulating part mutually insulating them. The conductive particles are obtained by coating core particles exhibiting magnetism with a high-conductive metal, a proportion of the high-conductive metal to the core particles is at least 15 % by mass, and the following t is at least 50 nm: t = Ä1/(Sw. rho )Ü x ÄN/(1 - N)Ü, wherein Sw is a BET specific surface area (m /kg) of the core particles, rho is a specific gravity (kg/m ) of the high-conductive metal, and N is (mass of the high-conductive metal/total mass of the conductive particles).
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公开(公告)号:AU2003254854A1
公开(公告)日:2004-02-25
申请号:AU2003254854
申请日:2003-08-07
Applicant: JSR CORP
Inventor: KOKUBO TERUKAZU , SENO KOJI , HARA TAKEO , SETAKA RYOJI
Abstract: Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer can be conducted with ease even when the wafer has a large area of 8 inches or greater in diameter, and the pitch of electrodes to be inspected is small, and good conductivity is retained even upon repeated use, and applications thereof. The anisotropically conductive connector has a frame plate, in which a plurality of anisotropically conductive film-arranging holes have been formed correspondingly to electrode regions in all or part of integrated circuits on a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes. The elastic anisotropically conductive films each have a plurality of conductive parts for connection extending in a thickness-wise direction thereof and containing conductive particles, and an insulating part mutually insulating them. The conductive particles are obtained by coating core particles exhibiting magnetism with a high-conductive metal, a proportion of the high-conductive metal to the core particles is at least 15 % by mass, and the following t is at least 50 nm: t = Ä1/(Sw. rho )Ü x ÄN/(1 - N)Ü, wherein Sw is a BET specific surface area (m /kg) of the core particles, rho is a specific gravity (kg/m ) of the high-conductive metal, and N is (mass of the high-conductive metal/total mass of the conductive particles).
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