MULTIFOCAL SPECTROSCOPIC MEASUREMENT DEVICE, AND OPTICAL SYSTEM FOR MULTIFOCAL SPECTROSCOPIC MEASUREMENT DEVICE
    2.
    发明公开
    MULTIFOCAL SPECTROSCOPIC MEASUREMENT DEVICE, AND OPTICAL SYSTEM FOR MULTIFOCAL SPECTROSCOPIC MEASUREMENT DEVICE 审中-公开
    多功能光谱测量装置和多光谱测量装置的光学系统

    公开(公告)号:EP3273225A1

    公开(公告)日:2018-01-24

    申请号:EP16743549.4

    申请日:2016-01-29

    Abstract: Provided is a multifocal spectrometric device capable of simultaneously performing a measurement of a plurality of sample with high sensitivity, with no restriction on the magnification. A multifocal spectrometric device 10 is a device in which beams of signal light emitted from a plurality of predetermined observation areas on samples S placed in a sample placement section (sample holder 13) are introduced into a spectrograph and thereby dispersed into spectra, the device including: a plurality of objective lenses (objective light-condensing sections) 111 individually located at positions which respectively and optically face the plurality of observation areas; and spectrograph input sections 151 provided in such a manner that each of the plurality of objective lenses 111 has one corresponding spectrograph input section 151, for introducing signal light passing through the corresponding objective lenses 111 into the spectrograph 17. Since each objective lens 111 only needs to observe one observation area, both the magnification and the numerical aperture NA can be simultaneously increased. Consequently, the proportion of the amount of light collected with the objective lens 111 to the entire amount of signal light emitted from the sample S within each observation area becomes high, and the measurement accuracy also becomes high.

    Abstract translation: 本发明提供一种多焦点光谱测定装置,其能够以高灵敏度同时进行多个样品的测定,并且倍率没有限制。 多焦点光谱测定装置10是将从放置在样品放置部分(样品架13)中的样品S上的多个预定观察区域发出的信号光束引入光谱仪中并由此分散到光谱中的装置,该装置包括 :多个物镜(物镜聚光部)111,分别位于与多个观察区域分别光学相对的位置; 以及光谱仪输入部分151,它们以这样的方式提供,使得多个物镜111中的每一个具有一个相应的光谱仪输入部分151,用于将穿过相应物镜111的信号光引入光谱仪17中。由于每个物镜111只需要 观察一个观察区域,可以同时增大放大率和数值孔径NA。 因此,在物镜111中聚光的光量相对于从各样品S出射的全部信号光在各观察区域内的比例变高,测定精度也变高。

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