公开(公告)号：US09929188B2

公开(公告)日：2018-03-27

申请号：US14357138

申请日：2012-11-07

Applicant: Japan Science and Technology Agency

Inventor： Tatsuya Shimoda ,  Toshihiko Kaneda

IPC: B44C1/22 ,  H01L27/12 ,  H01L45/00 ,  H01L41/09 ,  H01L41/317 ,  H01L41/332 ,  H01L29/786 ,  B41J2/16 ,  H01L21/67 ,  H01L27/108 ,  H01L21/28 ,  H01L29/78 ,  H01L49/02

CPC classification number: H01L27/1255 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1637 ,  B41J2/1645 ,  H01L21/28291 ,  H01L21/67098 ,  H01L27/10805 ,  H01L27/10873 ,  H01L27/1262 ,  H01L27/127 ,  H01L28/55 ,  H01L29/78391 ,  H01L29/7869 ,  H01L41/0973 ,  H01L41/317 ,  H01L41/332 ,  H01L45/1206 ,  H01L45/1226 ,  H01L45/147 ,  H01L45/1608

Abstract: According to the present invention, a method of producing a functional device includes the imprinting step and the functional solid material layer formation step. In the imprinting step, a functional solid material precursor layer obtained from a functional solid material precursor solution as a start material is imprinted so that a first temperature of a heat source for supplying heat to the functional solid material precursor layer is higher than a second temperature of the functional solid material precursor layer in at least part of a time period while a mold for forming an imprinted structure is pressed against the functional solid material precursor layer. In the functional solid material layer formation step, after the imprinting step, the functional solid material precursor layer is heat treated at a third temperature higher than the first temperature in an atmosphere containing oxygen to form a functional solid material layer from the functional solid material precursor layer.

公开(公告)号：US20150004762A1

公开(公告)日：2015-01-01

申请号：US14357138

申请日：2012-11-07

Applicant: Japan Science and Technology Agency

Inventor： Tatsuya Shimoda ,  Toshihiko Kaneda

IPC: H01L27/12 ,  H01L21/67 ,  H01L27/108

CPC classification number: H01L27/1255 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1637 ,  B41J2/1645 ,  H01L21/28291 ,  H01L21/67098 ,  H01L27/10805 ,  H01L27/10873 ,  H01L27/1262 ,  H01L27/127 ,  H01L28/55 ,  H01L29/78391 ,  H01L29/7869 ,  H01L41/0973 ,  H01L41/317 ,  H01L41/332 ,  H01L45/1206 ,  H01L45/1226 ,  H01L45/147 ,  H01L45/1608

Abstract: According to the present invention, a method of producing a functional device includes the imprinting step and the functional solid material layer formation step. In the imprinting step, a functional solid material precursor layer obtained from a functional solid material precursor solution as a start material is imprinted so that a first temperature of a heat source for supplying heat to the functional solid material precursor layer is higher than a second temperature of the functional solid material precursor layer in at least part of a time period while a mold for forming an imprinted structure is pressed against the functional solid material precursor layer. In the functional solid material layer formation step, after the imprinting step, the functional solid material precursor layer is heat treated at a third temperature higher than the first temperature in an atmosphere containing oxygen to form a functional solid material layer from the functional solid material precursor layer.

Abstract translation: 根据本发明，制造功能元件的方法包括压印步骤和功能固体材料层形成步骤。 在压印步骤中，将由作为起始材料的功能固体材料前体溶液获得的功能固体材料前体层压印，使得用于向功能性固体材料前体层供给热量的热源的第一温度高于第二温度 的功能固体材料前体层的至少一部分，同时用于形成压印结构的模具被压在功能固体材料前体层上。 在功能固体材料层形成工序中，在压印步骤之后，在含氧气氛中，在高于第一温度的第三温度下对功能固体材料前体层进行热处理，从功能性固体材料前体形成功能固体材料层 层。

公开(公告)号：US09123752B2

公开(公告)日：2015-09-01

申请号：US14531723

申请日：2014-11-03

Applicant: Japan Science and Technology Agency

Inventor： Tatsuya Shimoda ,  Eisuke Tokumitsu ,  Takaaki Miyasako ,  Toshihiko Kaneda

IPC: H01L29/10 ,  H01L29/66 ,  B41J2/16 ,  C23C18/12 ,  B05D5/06 ,  H01L21/02 ,  H01L21/368 ,  H01L29/786 ,  H01L41/33 ,  H01L41/318 ,  H01L27/12 ,  C23C18/06 ,  H01L21/441 ,  H01L41/09

CPC classification number: H01L29/66969 ,  B05D5/06 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1637 ,  B41J2/1639 ,  B41J2/1643 ,  B41J2/1645 ,  C23C18/06 ,  C23C18/1216 ,  C23C18/1254 ,  C23C18/1279 ,  C23C18/1283 ,  C23C18/1295 ,  H01L21/02104 ,  H01L21/0237 ,  H01L21/02521 ,  H01L21/02601 ,  H01L21/02628 ,  H01L21/38 ,  H01L21/441 ,  H01L27/1225 ,  H01L27/1292 ,  H01L29/786 ,  H01L29/7869 ,  H01L41/0973 ,  H01L41/318 ,  H01L41/33

Abstract: A method of producing a functional device according to the present invention includes, in this order: the functional solid material precursor layer formation step of applying a functional liquid material onto a base material to form a precursor layer of a functional solid material; the drying step of heating the precursor layer to a first temperature in a range from 80° C. to 250° C. to preliminarily decrease fluidity of the precursor layer; the imprinting step of imprinting the precursor layer that is heated to a second temperature in a range from 80° C. to 300° C. to form an imprinted structure on the precursor layer; and the functional solid material layer formation step of heat treating the precursor layer at a third temperature higher than the second temperature to transform the precursor layer into a functional solid material layer.

Abstract translation: 本发明的功能元件的制造方法依次包括功能固体材料前体层的形成工序，将功能性液态材料涂布在基材上形成功能性固体材料的前体层; 所述干燥步骤将所述前体层加热至80℃至250℃的第一温度，以预先降低所述前体层的流动性; 将加热到80℃至300℃的第二温度的前体层的压印步骤，在前体层上形成压印结构; 以及在高于第二温度的第三温度下对前体层进行热处理以将前体层转变成功能性固体材料层的功能性固体材料层形成步骤。